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Critical Reviews in Solid State and Materials Sciences Volume 31, 2006 - Issue 3
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Original Articles

Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

S. J. Randolph The University of Tennessee, Knoxville, Tennessee, USA; Oak Ridge National Laboratory, Oak Ridge, Tennessee, USA
,
J. D. Fowlkes The University of Tennessee, Knoxville, Tennessee, USA; Oak Ridge National Laboratory, Oak Ridge, Tennessee, USA
&
P. D. Rack The University of Tennessee, Knoxville, Tennessee, USA; Oak Ridge National Laboratory, Oak Ridge, Tennessee, USA
Pages 55-89 | Published online: 18 Jan 2007

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