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Materials and Manufacturing Processes Volume 26, 2011 - Issue 3
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Original Articles

Optimization of Wavelet-Filtered In-Situ Plasma Etch Data Using Neural Network and Genetic Algorithm

Byungwhan Kim Department of Electronic Engineering, Sejong University, Seoul, South KoreaCorrespondence[email protected]
,
Daehyun Kim Department of Electronic Engineering, Sejong University, Seoul, South Korea
,
Dongil Han Department of Computer Engineering, Sejong University, Seoul, South Korea
&
Nae-Il Lee Atto Co., Ltd., Semiconductor Equipment Division, Pyeongtaek City, South Korea
Pages 398-402 | Received 02 Jul 2010, Accepted 12 Aug 2010, Published online: 08 Apr 2011

Citations (6)

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Read on this site (3)

Shen-Tsu Wang. (2014) Optimized Light Guide Plate Optical Brightness Parameter: Integrating Back-Propagation Neural Network (BPN) and Revised Genetic Algorithm (GA). Materials and Manufacturing Processes 29:1, pages 1-8.
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Guojun Zhang, Zhen Zhang, Jianwen Guo, Wuyi Ming, Mingzhen Li & Yu Huang. (2013) Modeling and Optimization of Medium-Speed WEDM Process Parameters for Machining SKD11. Materials and Manufacturing Processes 28:10, pages 1124-1132.
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Wojciech Paszkowicz. (2013) Genetic Algorithms, a Nature-Inspired Tool: A Survey of Applications in Materials Science and Related Fields: Part II. Materials and Manufacturing Processes 28:7, pages 708-725.
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Articles from other publishers (3)

Hsuan-Fan Chen, Yu-Pu Yang, Wei-Lun Chen, Peter J. Wang, Walter Lai, Yiin-Kuen Fuh & Tomi T. Li. (2023) Predicting residual stress of aluminum nitride thin-film by incorporating manifold learning and tree-based ensemble classifier. Materials Chemistry and Physics 295, pages 127070.
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Chorng-Jyh Tzeng & Rui-Yang Chen. (2013) Optimization of electric discharge machining process using the response surface methodology and genetic algorithm approach. International Journal of Precision Engineering and Manufacturing 14:5, pages 709-717.
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SHIH-CHENG HORNGSHIN-YEU LIN. (2013) COMBINING EVOLUTION STRATEGY WITH ORDINAL OPTIMIZATION. International Journal of Information Technology & Decision Making 12:02, pages 233-260.
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