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Materials and Manufacturing Processes Volume 28, 2013 - Issue 2
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Original Articles

Electrochemical Mechanical Polishing of Copper with High Permittivity Abrasives

Weisi Li Key Laboratory for Precision and Nontraditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, China
,
Dongming Guo Key Laboratory for Precision and Nontraditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, China
,
Zhuji Jin Key Laboratory for Precision and Nontraditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, ChinaCorrespondence[email protected]
,
Zhe Wang Key Laboratory for Precision and Nontraditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, China
&
Zewei Yuan Key Laboratory for Precision and Nontraditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, China
Pages 207-212 | Received 23 Aug 2011, Accepted 02 Jan 2012, Published online: 05 Feb 2013

Citations (11)

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Read on this site (8)

Zhao-Wei Zhong. (2020) Advanced polishing, grinding and finishing processes for various manufacturing applications: a review. Materials and Manufacturing Processes 35:12, pages 1279-1303.
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Fabio Scherillo, Antonello Astarita, Umberto Prisco & Antonino Squillace. (2018) Selective electrochemical machining of the steel molds in hot isostatic pressing of Ti6Al4V powder. Materials and Manufacturing Processes 33:14, pages 1587-1593.
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Jai Kishan Sambharia, Harlal Singh Mali & Vishal Garg. (2018) Experimental investigation on unidirectional abrasive flow machining of trim die workpiece. Materials and Manufacturing Processes 33:6, pages 651-660.
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X. Lü, R. Zhang & Y. Wang. (2016) Novel stability evaluation for short circuiting transfer based on features of input power. Science and Technology of Welding and Joining 21:1, pages 53-58.
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Shuangji Shi, Zhuji Jin, Xiuhong Zhong, Jiazhi Lin & Bo Yin. (2015) Processing and Mechanism of Dynamic Friction Polishing Diamond Using Manganese-Based Alloy. Materials and Manufacturing Processes 30:5, pages 654-660.
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A. Cheng Wang, Ken Chuan Cheng, Kuan Yu Chen & Yan-Cherng Lin. (2014) Enhancing the Surface Precision for the Helical Passageways in Abrasive Flow Machining. Materials and Manufacturing Processes 29:2, pages 153-159.
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Z.W. Zhong, Y.B. Tian, J.H. Ng & Y.J. Ang. (2014) Chemical Mechanical Polishing (CMP) Processes for Manufacturing Optical Silicon Substrates with Shortened Polishing Time. Materials and Manufacturing Processes 29:1, pages 15-19.
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K.B. Judal & Yinod Yadava. (2013) Experimental Investigations into Electrochemical Magnetic Abrasive Machining of Cylindrical Shaped Nonmagnetic Stainless Steel Workpiece. Materials and Manufacturing Processes 28:10, pages 1095-1101.
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Articles from other publishers (3)

Chenxu Liu, Yu Tian & Yonggang Meng. (2021) A Chemical Potential Equation for Modeling Triboelectrochemical Reactions on Solid–Liquid Interfaces. Frontiers in Chemistry 9.
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Di Wu, Renke Kang, Lin Niu, Bo Pan, Zuotao Liu & Jiang Guo. (2019) Two-Step Electrochemical Mechanical Polishing of Pure Copper. ECS Journal of Solid State Science and Technology 8:11, pages P699-P703.
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Chloé Rotty, Marie-Laure Doche, Audrey Mandroyan, Jean-Yves Hihn, Ghislain Montavon & Virginie Moutarlier. (2017) Comparison of electropolishing behaviours of TSC, ALM and cast 316L stainless steel in H3PO4/H2SO4. Surfaces and Interfaces 6, pages 170-176.
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