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Materials and Manufacturing Processes Volume 32, 2017 - Issue 10
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Original Articles

Optimizing FIB milling process parameters for silicon and its use in nanoreplication

A. GoswamiIndian Institute of Technology Delhi, Hauz Khas, New Delhi, India
,
K. SinghIndian Institute of Technology Delhi, Hauz Khas, New Delhi, India
,
S. AravindanIndian Institute of Technology Delhi, Hauz Khas, New Delhi, IndiaCorrespondence[email protected]
&
P. V. RaoIndian Institute of Technology Delhi, Hauz Khas, New Delhi, India
Pages 1052-1058 | Received 29 Jun 2016, Accepted 13 Oct 2016, Published online: 24 Jan 2017

Citations (8)

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Read on this site (2)

Swarup S. Deshmukh & Arjyajyoti Goswami. (2021) Recent developments in hot embossing – a review. Materials and Manufacturing Processes 36:5, pages 501-543.
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N. Syahira M. Annuar, Reza Mahmoodian & Mohd Hamdi Abd Shukor. (2020) Effect of focused ion beam process parameter on Tin-Nickel-Copper micropillars microfabrication. Materials and Manufacturing Processes 35:2, pages 163-171.
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Articles from other publishers (6)

Tuhin Kar & Arjyajyoti Goswami. (2022) Mathematical Modeling Approaches and New Development in Laser Micro Machining Process: A Review. Lasers in Manufacturing and Materials Processing 9:4, pages 532-568.
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Noor Dzulaikha Daud, Md. Nazibul Hasan, Tanveer Saleh, Pei Ling Leow & Mohamed Sultan Mohamed Ali. (2022) Non-traditional machining techniques for silicon wafers. The International Journal of Advanced Manufacturing Technology 121:1-2, pages 29-57.
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Saranya Sambathkumar & Ravi Sankar Arunagirinathan. (2021) Fabrication of micro-mechanical planar cantilever beam-mass structures on quartz substrates using an ECDM process. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 236:6-7, pages 668-679.
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Swarup S. Deshmukh & Arjyajyoti Goswami. (2022) Current innovations in roller embossing—a comprehensive review. Microsystem Technologies 28:5, pages 1077-1114.
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Rik Dasgupta & Arjyajyoti Goswami. (2022) Numerical studies on effect of ARC thickness for reflectance reduction of c-Si wafer. Materials Today: Proceedings 59, pages 1083-1087.
Crossref
Arjyajyoti Goswami. 2020. Accuracy Enhancement Technologies for Micromachining Processes. Accuracy Enhancement Technologies for Micromachining Processes 165 198 .

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