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Journal of the Air & Waste Management Association Volume 55, 2005 - Issue 5
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Technical Paper

Field Enhancements of Packed-Bed Performance for Low-Concentration Acidic and Basic-Waste Gases from Semiconductor Manufacturing Process

Hung Min Chein Environmental Nanotechnology Research Laboratory, Center for Environmental, Safety, and Health Technology Development, Industrial Technology Research Institute, Hsinchu, Taiwan, Republic of ChinaCorrespondence[email protected]
,
Shankar Gopala Aggarwal Environmental Nanotechnology Research Laboratory, Center for Environmental, Safety, and Health Technology Development, Industrial Technology Research Institute, Hsinchu, Taiwan, Republic of China
,
Hsin Hsien Wu Environmental Nanotechnology Research Laboratory, Center for Environmental, Safety, and Health Technology Development, Industrial Technology Research Institute, Hsinchu, Taiwan, Republic of China
,
Tzu Ming Chen Environmental Nanotechnology Research Laboratory, Center for Environmental, Safety, and Health Technology Development, Industrial Technology Research Institute, Hsinchu, Taiwan, Republic of China
&
Chun-Chao Huang Environmental Nanotechnology Research Laboratory, Center for Environmental, Safety, and Health Technology Development, Industrial Technology Research Institute, Hsinchu, Taiwan, Republic of China
Pages 647-657 | Published online: 01 Mar 2012

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Hak-Joon Kim, Bangwoo Han, Yong-Jin Kim, Seok-Jun Yoa & Tetsuji Oda. (2012) Integration of a nonmetallic electrostatic precipitator and a wet scrubber for improved removal of particles and corrosive gas cleaning in semiconductor manufacturing industries. Journal of the Air & Waste Management Association 62:8, pages 905-915.
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Articles from other publishers (8)

Ming-Peng Yeh, Lian-Fang Wu, En-Tsu Fan, Tony Chen, Tzu-Sou Chuang, Sher Ling Lee & Kuo-Lun Tung. (2024) Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories. Chemosphere 347, pages 140745.
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Yumeng Zhao, Kai Ren & Wenfang Huang. (2023) Which Is More Environmentally Friendly? A Comparative Analysis of the Environmental Benefits of Two Waste-to-Energy Technologies for Plastics Based on an LCA Model. Sustainability 15:10, pages 8209.
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Sehyun Kim, Kiwoong Park, Changyoung Choi, Man Yeong Ha & Donggeun Lee. (2022) Removal of ultrafine particles in a full-scale two-stage electrostatic precipitator employing a carbon-brush ionizer for residential use. Building and Environment 223, pages 109493.
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Thi-Cuc Le, Gung-Hwa Hong, Guan-Yu Lin, Ziyi Li, David Y. H. Pui, Yi-Ling Liou, Bing-Tsai Wang & Chuen-Jinn Tsai. (2021) Honeycomb wet scrubber for acidic gas control: modeling and long-term test results. Sustainable Environment Research 31:1.
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HS Huboyo, Sudarno & LN Prassanty. (2020) Wet Scrubber for Coal Combustion with The Use of Textile Wastewater Feeding. IOP Conference Series: Earth and Environmental Science 506:1, pages 012012.
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Yong-Jin Kim, Bangwoo Han, Chang Gyu Woo & Hak-Joon Kim. (2017) Performance of Ultrafine Particle Collection of a Two-Stage ESP Using a Novel Mixing Type Carbon Brush Charger and Parallel Collection Plates. IEEE Transactions on Industry Applications 53:1, pages 466-473.
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Hak-Joon Kim, Bangwoo Han, Chang-Gyu Woo, Yong-Jin Kim, Seong-Jin Park & Jong-Pil Yoon. (2015) Ultrafine particle collection performance of an two-stage ESP using a novel mixing type carbon brush charger and parallel collection plates. Ultrafine particle collection performance of an two-stage ESP using a novel mixing type carbon brush charger and parallel collection plates.
Chih-Liang Chien, Chuen-Jinn Tsai, Shiang-Ru Sheu, Yu-Hsiang Cheng & Alexander Mihailovich Starik. (2015) High-efficiency parallel-plate wet scrubber (PPWS) for soluble gas removal. Separation and Purification Technology 142, pages 189-195.
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