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Journal of the Air & Waste Management Association Volume 56, 2006 - Issue 11
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Technical Paper

Emission Factors of Air Toxics from Semiconductor Manufacturing in Korea

Yun-Sung Eom Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of Korea
,
Ji-Hyung Hong Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of Korea
,
Suk-Jo Lee Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of Korea
,
Eun-Jung Lee Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of KoreaCorrespondence[email protected]
,
Jun-Seok Cha Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of Korea
,
Dae-Gyun Lee Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of Korea
&
Sun-Ae Bang Division of Air Pollution Engineering, Department of Air Quality Research, National Institute of Environmental Research, Ministry of Environment, Incheon, Republic of Korea
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Pages 1518-1524 | Published online: 27 Feb 2012

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Hak-Joon Kim, Bangwoo Han, Yong-Jin Kim, Seok-Jun Yoa & Tetsuji Oda. (2012) Integration of a nonmetallic electrostatic precipitator and a wet scrubber for improved removal of particles and corrosive gas cleaning in semiconductor manufacturing industries. Journal of the Air & Waste Management Association 62:8, pages 905-915.
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Ming-Peng Yeh, Lian-Fang Wu, En-Tsu Fan, Tony Chen, Tzu-Sou Chuang, Sher Ling Lee & Kuo-Lun Tung. (2024) Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories. Chemosphere 347, pages 140745.
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Jianxin Fang, Brenda Cheang & Andrew Lim. (2023) Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey. Sustainability 15:17, pages 13012.
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Kyungsik Kim, Ho Kyung Sung, Jieun Jang, Eunyoung E. Suh, Kwan Lee & Sue K. Park. (2022) Health Status, Health-Related Factors and Work Environment in Korean Semiconductor Workers between 1984–2012: A Qualitative Study and a Cross-Sectional Study. International Journal of Environmental Research and Public Health 19:10, pages 6286.
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Arif Hussain, Naseem Abbas & Ahsan Ali. (2022) Inkjet Printing: A Viable Technology for Biosensor Fabrication. Chemosensors 10:3, pages 103.
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Thi-Cuc Le, Gung-Hwa Hong, Guan-Yu Lin, Ziyi Li, David Y. H. Pui, Yi-Ling Liou, Bing-Tsai Wang & Chuen-Jinn Tsai. (2021) Honeycomb wet scrubber for acidic gas control: modeling and long-term test results. Sustainable Environment Research 31:1.
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Justus Kavita Mutuku, Yen-Yi Lee, Bo-Wun Huang, Wei-Hsin Chen & Wen-Che Hou. (2021) Assessment of the emission factors for potentially toxic elements from coal-fired boilers and sintering furnaces in a steel production plant. Science of The Total Environment 792, pages 148329.
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Euler Gallego-Cartagena, Héctor Morillas, José Antonio Carrero, Juan Manuel Madariaga & Maite Maguregui. (2021) Naturally growing grimmiaceae family mosses as passive biomonitors of heavy metals pollution in urban-industrial atmospheres from the Bilbao Metropolitan area. Chemosphere 263, pages 128190.
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Mahdi Sharifzadeh, Giorgio Triulzi & Christopher L. Magee. (2019) Quantification of technological progress in greenhouse gas (GHG) capture and mitigation using patent data. Energy & Environmental Science 12:9, pages 2789-2805.
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Yong-Jin Kim, Bangwoo Han, Chang Gyu Woo & Hak-Joon Kim. (2017) Performance of Ultrafine Particle Collection of a Two-Stage ESP Using a Novel Mixing Type Carbon Brush Charger and Parallel Collection Plates. IEEE Transactions on Industry Applications 53:1, pages 466-473.
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Chih-Liang Chien, Aditya Prana Iswara, Yi-Ling Liou, Bing-Tsai Wang, Jui-Chiao Chang, Yi-Hung Hung & Chuen-Jinn Tsai. (2015) A real-time monitoring system for soluble gas pollutants and it’s application for determining the control efficiency of packed towers. Separation and Purification Technology 154, pages 137-148.
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Hak-Joon Kim, Bangwoo Han, Chang-Gyu Woo, Yong-Jin Kim, Seong-Jin Park & Jong-Pil Yoon. (2015) Ultrafine particle collection performance of an two-stage ESP using a novel mixing type carbon brush charger and parallel collection plates. Ultrafine particle collection performance of an two-stage ESP using a novel mixing type carbon brush charger and parallel collection plates.
Chih-Liang Chien, Chuen-Jinn Tsai, Shiang-Ru Sheu, Yu-Hsiang Cheng & Alexander Mihailovich Starik. (2015) High-efficiency parallel-plate wet scrubber (PPWS) for soluble gas removal. Separation and Purification Technology 142, pages 189-195.
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Mei-Fang Lu, Mei-Chuan Huang & Jim Juimin Lin. (2011) Emission distribution of volatile organic compounds of semiconductor and photovoltaic (TFT-LCD) industries. Emission distribution of volatile organic compounds of semiconductor and photovoltaic (TFT-LCD) industries.

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