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Integrated Ferroelectrics
An International Journal
Volume 30, 2000 - Issue 1-4
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Original Articles

Low temperature process for strontium bismuth tantalate thin films

J. Celinska Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA
,
V. Joshi Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA
,
S. Narayan Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA
,
L. D. Mcmillan Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA
&
C. A. Paz De Araujo Symetrix Corporation, 5055 mark Dabling Blvd., Colorado Springs, Colorado, 80918, USA
Pages 1-8 | Received 10 Apr 2000, Published online: 19 Aug 2006

Citations (23)

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Read on this site (3)

Nam-Kyeong Kim, Seung-Jin Yeom, Soon-Yong Kweon, Eun-Seok Choi, Ho-Jung Sun, Hyun-Chul Sohn & Jae-Sung Roh. (2005) Crystallographic Orientation Dependent Ferroelectric Characteristics of (Bi3.3,La0.8)Ti3O12 (BLT) Capacitors. Integrated Ferroelectrics 70:1, pages 89-97.
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Woo Seok Yang, Nam Kyeong Kim, Seung Jin Yeom, Soon Yong Kweon, Eun Seok Choi & Jae Sung Roh. (2001) Effects of rapid thermal annealing (RTA) process on pysical and electrical properties of Bi4La4-xTi3O12 (BLT) thin film. Integrated Ferroelectrics 39:1-4, pages 151-159.
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Nam Kyeong Kim, Woo Seok Yang, Seung Jin Yeom, Soon Yong Kweon, Eun Seok Choi & Jae Sung Roh. (2001) Stacked Pt/BLT/Pt/IrOx/Ir capacitor for high density feram. Integrated Ferroelectrics 39:1-4, pages 81-89.
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Articles from other publishers (20)

Orlando Auciello, Carlos A. Paz de Araujo & Jolanta Celinska. 2014. Emerging Non-Volatile Memories. Emerging Non-Volatile Memories 3 35 .
Lorena Pardo & Jesús RicoteIñigo Bretos & M. Lourdes Calzada. 2011. Multifunctional Polycrystalline Ferroelectric Materials. Multifunctional Polycrystalline Ferroelectric Materials 145 216 .
Yibin Li, Sam Zhang, Thirumany Sritharan, Xiaodong He & Weidong Fei. (2009) Reduction of crystallization temperature of the Aurivillius phase in Nd-doped SrBi2Ta2O9 thin films via substrate bias. Thin Solid Films 517:8, pages 2633-2637.
Crossref
I. Bretos, R. Jiménez, E. Rodriguez-Castellón, J. García-López & M. L. Calzada. (2008) Heterostructure and Compositional Depth Profile of Low-Temperature Processed Lead Titanate-Based Ferroelectric Thin Films Prepared by Photochemical Solution Deposition. Chemistry of Materials 20:4, pages 1443-1450.
Crossref
Yun-Mo Sung, Woo-Chul Kwak, Se-Yeon Jung, Jung-Joon Na & Sang M. Park. (2006) Strong thickness dependence of aurivillius phase formation in SrBi2Ta2O9 thin films. Journal of Electroceramics 17:2-4, pages 119-123.
Crossref
Byong-Ho Kim & Dong-Kyun Kang. (2005) Characteristics of ferroelectric Sr0.7Bi2.1Ta2.0O9 thin films grown by liquid delivery metal organic chemical vapor deposition process. Thin Solid Films 492:1-2, pages 140-145.
Crossref
Yun-Mo Sung & Woo-Chul Kwak. (2005) Fluorite-to-Aurivillius phase transformation kinetics in sol–gel derived SBT thin films. Chemical Physics Letters 411:4-6, pages 389-394.
Crossref
M. L. Calzada, I. Bretos, R. Jiménez, H. Guillon & L. Pardo. (2004) Low‐Temperature Processing of Ferroelectric Thin Films Compatible with Silicon Integrated Circuit Technology. Advanced Materials 16:18, pages 1620-1624.
Crossref
Sang-Hyun Oh, Keum Hwan Noh, Seaung Suk Lee, Hee-Bok Kang, Young Ho Yang, Kye-Nam Lee, Suk-Kyoung Hong & Young-Jin Park. (2004) Performance and Reliability of Low-Temperature Processed SrBi[sub 2]Ta[sub 2]O[sub 9] Capacitors for FeRAM Applications. Journal of The Electrochemical Society 151:5, pages F113.
Crossref
Jesús Ricote, M. Lourdes Calzada, Ana González & Carmen Ocal. (2008) Microstructural Studies on the Low‐Temperature Crystallization Process of Strontium Bismuth Tantalate Thin Films. Journal of the American Ceramic Society 87:1, pages 138-143.
Crossref
M. L. Calzada, A. González, J. García-López & R. Jiménez. (2003) Crystallization, Heterostructure, Microstructure, and Properties of Ferroelectric Strontium Bismuth Tantalate Films Derived from Tantalum Glycolate Solutions. Chemistry of Materials 15:25, pages 4775-4783.
Crossref
Se-Yeon Jung, Seung-Joon Hwang & Yun-Mo Sung. (2003) Enhanced Aurivillius phase formation kinetics in seeded SBT thin films. Journal of Crystal Growth 254:1-2, pages 92-99.
Crossref
Hye In Kim, Young Soo Song, J. Sok & Chee Won Chung. (2003) Effect of La doping on structural and electrical properties of ferroelectric Bi4−xLaxTi3O12 thin films prepared by chemical solution deposition. Thin Solid Films 429:1-2, pages 114-118.
Crossref
Yun-Mo Sung, Gopinathan M. Anilkumar & Seung-Joon Hwang. (2011) Influence of nanoparticle seeding on the phase formation kinetics of sol-gel-derived Sr 0.7 Bi 2.4 Ta 2 O 9 thin films . Journal of Materials Research 18:2, pages 387-395.
Crossref
. (2003) A Study on fabrication of Ferroelectric SBT Thin Films by Liquid Delivery MOCVD Process. Journal of the Korean Ceramic Society 40:1, pages 46-51.
Crossref
Yun-Mo Sung, Woo-Chul Kwak, Se-Yon Jung & Seung-Joon Hwang. (2011) Enhancement of Aurivillius Phase Formation Kinetics in SBT Thin Films using Nanoparticle Seeding. MRS Proceedings 784.
Crossref
Hiroshi Uchida, Hiroki Yoshikawa, Isao Okada, Hirofumi Matsuda, Takashi Iijima, Takayuki Watanabe, Takashi Kojima & Hiroshi Funakubo. (2002) Approach for enhanced polarization of polycrystalline bismuth titanate films by Nd3+/V5+ cosubstitution. Applied Physics Letters 81:12, pages 2229-2231.
Crossref
L. Pardo, R. Poyato, A. González & M.L. Calzada. (2002) Low temperature preparation of piezoelectric thin films by ultraviolet-assisted rapid thermal processing. Materials Science in Semiconductor Processing 5:2-3, pages 77-83.
Crossref
H. Uchida, H. Yoshikawa, I. Okada, H. Matsuda, T. Iijima, T. Watanabe & H. Funakubo. (2011) Fabrication of V-Substituted (Bi,M) 4 Ti 3 O 12 [M = Lanthanoids] Thin Films by Chemical Solution Deposition Method . MRS Proceedings 688.
Crossref
N. Soyama, Y. Tokita, S. Mori, K. Ogi & V. Joshi. (2001) Low temperature deposition of SBT thin films using modified sol-gel solutions. Low temperature deposition of SBT thin films using modified sol-gel solutions.

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