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Integrated Ferroelectrics
An International Journal
Volume 41, 2001 - Issue 1-4
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Section N: Piezoelectric phenomena and MEMS

Micromirror actuated by PZT film for optical application

Hyo-Jin Nam LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Seong-Moon Cho LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Young-Sik Kim LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Dong-Chun Kim LG Corporate Institute of Technology, Seoul, 137-724, Korea
&
Jong-Uk Bu LG Corporate Institute of Technology, Seoul, 137-724, Korea
Pages 63-72 | Received 14 Mar 2001, Published online: 19 Aug 2006

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IL-JOO CHO, SEONGSOO JANG & HYO-JIN NAM. (2009) A PIEZOELECTRICALLY ACTUATED MEMS SPEAKER WITH POLYIMIDE MEMBRANE AND THIN FILM Pb(Zr,Ti)O3(PZT) ACTUATOR. Integrated Ferroelectrics 105:1, pages 27-36.
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HUAJUN FANG, LITIAN LIU, XIAOMING WU, NINGXIN ZHANG & TIANLING REN. (2005) DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED PIEZOELECTRIC UNIMORPH ACTUATORS USING PZT FILMS. Integrated Ferroelectrics 76:1, pages 23-30.
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SIDNEYB. LANG. (2004) Guide to the Literature of Piezoelectricity and Pyroelectricity. 21. Ferroelectrics 300:1, pages 177-280.
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Articles from other publishers (1)

John Pelesko & David Bernstein. 2002. Modeling MEMS and NEMS. Modeling MEMS and NEMS.

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