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Integrated Ferroelectrics
An International Journal
Volume 52, 2003 - Issue 1
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Original Articles

Influence of Pt/TiO2 Bottom Electrodes on the Properties of Ferroelectric Pb(Zr,Ti)O3 Thin Films

Soichiro Okamura Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
,
Norikazu Abe Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
,
Yohei Otani Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
&
Tadashi Shiosaki Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
Pages 127-136 | Published online: 07 Jul 2010

Citations (10)

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Read on this site (3)

YOHEI OTANI, KIYOSHI UCHIYAMA, SOICHIRO OKAMURA & TADASHI SHIOSAKI. (2006) LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O3 THIN FILMS BY LIQUID DELIVERY MOCVD USING A COCKTAIL SOURCE WITH Pb(DMAMP)2, Zr(MMP)4 AND Ti(MMP)4 . Integrated Ferroelectrics 81:1, pages 261-270.
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CHAOWEI ZHONG, JIAGEN PENG, SHUREN ZHANG & WANGLI ZHANG. (2006) FABRICATION OF PZT THIN FILMS WITH TiOx BUFFER LAYERS BY RF MAGNETRON SPUTTERING. Integrated Ferroelectrics 80:1, pages 281-288.
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YOHEI OTANI, KIMITOSHI NAKAMURA, SOICHIRO OKAMURA & TADASHI SHIOSAKI. (2004) Fabrication of Pb(Zr,Ti)O3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(DPM)2, Zr(MMP)4 and Ti(MMP)4 . Integrated Ferroelectrics 68:1, pages 105-121.
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Articles from other publishers (7)

Wensheng Wang, Kenji Nomura, Ko Nakamura, Takashi Eshita, Soichiro Ozawa, Hideshi Yamaguchi, Kazuaki Takai, Junichi Watanabe, Satoru Mihara, Yukinobu Hikosaka, Hitoshi Saito, Yuji Kataoka & Manabu Kojima. (2019) Ferroelectric random access memory with high electric properties and high production yield realized by employing an AlO x underlying layer of Pt bottom electrode for a La-doped lead zirconate titanate capacitor . Japanese Journal of Applied Physics 58:1, pages 016503.
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Orapim Namsar, Soodkhet Pojprapai, Anucha Watcharapasorn & Sukanda Jiansirisomboon. (2015) Polarization fatigue in ferroelectric Pb(Zr0.52Ti0.48)O3-SrBi2Nb2O9 ceramics. Electronic Materials Letters 11:5, pages 881-889.
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O. Namsar, S. Pojprapai, A. Watcharapasorn & S. Jiansirisomboon. (2014) Enhancement of fatigue endurance in ferroelectric PZT ceramic by the addition of bismuth layered SBT. Journal of Applied Physics 116:16.
Crossref
Q.G. Chi, W.L. Li, C.Q. Liu, J.M. Wang & W.D. Fei. (2009) Effect of TiOx seed layer on the texture and electric properties in La and Ca modified PbTiO3 thin films. Thin Solid Films 517:17, pages 4826-4829.
Crossref
Ebru Mensur Alkoy, Sedat Alkoy & Tadashi Shiosaki. (2007) The effect of crystallographic orientation and solution aging on the electrical properties of sol?gel derived Pb(Zr0.45Ti0.55)O3 thin films. Ceramics International 33:8, pages 1455-1462.
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Jiang-Li Cao, Axel Solbach, Uwe Klemradt, Thomas Weirich, Joachim Mayer, Herbert Horn-Solle, Ulrich Böttger, Peter J. Schorn, T. Schneller & Rainer Waser. (2006) Structural investigations of Pt∕TiOx electrode stacks for ferroelectric thin film devices. Journal of Applied Physics 99:11.
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Jiang‐Li Cao, Axel Solbach, Uwe Klemradt, Thomas Weirich, Joachim Mayer, Ulrich Böttger, Ulrich Ellerkmann, Peter J. Schorn, Peter Gerber & Rainer Waser. (2006) Effects of Thermal Annealing on the Structure of Ferroelectric Thin Films. Journal of the American Ceramic Society 89:4, pages 1321-1325.
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