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Integrated Ferroelectrics
An International Journal
Volume 52, 2003 - Issue 1
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Original Articles

Miniature Microphone with Silicon-Based Ferroelectric Thin Films

Yi Yang Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
,
Tian-Ling Ren Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
,
Lin-Tao Zhang Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
,
Ning-Xin Zhang Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
,
Xiao-Ming Wu Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
,
Jian-She Liu Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
,
Li-Tian Liu Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
&
Zhi-Jian Li Institute of Microelectronics, Tsinghua University, Beijing 100084, People's Republic of China
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Pages 229-235 | Published online: 07 Jul 2010

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ZE JIA, HONG HU, DAN XIE, ZHI-GANG ZHANG, NING-XIN ZHANG, TIAN-LING REN & LI-TIAN LIU. (2006) STUDY ON STRESS OF THE FILMS APPLIED TO FeRAM. Integrated Ferroelectrics 81:1, pages 97-103.
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Articles from other publishers (5)

Washim Reza Ali & Mahanth Prasad. (2021) Design and Fabrication of Piezoelectric MEMS Sensor for Acoustic Measurements. Silicon 14:12, pages 6737-6747.
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Washim Reza Ali & Mahanth Prasad. (2022) Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique. Microelectronic Engineering 253, pages 111670.
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Washim Reza Ali & Mahanth Prasad. (2020) Piezoelectric MEMS based acoustic sensors: A review. Sensors and Actuators A: Physical 301, pages 111756.
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Tian-Ling Ren, Hao Chen, Yi Yang, Yi-Ping Zhu, Di Fu, Chao Wang, Xiao-Ming Wu, Jian Cai, Li-Tian Liu & Zhi-Jian Li. (2009) Micromachined piezoelectric acoustic device. Micromachined piezoelectric acoustic device.
Ren Tian-Ling. (2004) Novel MEMS devices for information systems. Novel MEMS devices for information systems.

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