Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 67, 2004 - Issue 1
Submit an article Journal homepage
58
Views
16
CrossRef citations to date
0
Altmetric
Original Articles

Optimisation of Surface Capacitance and Leakage Currents on Ion Beam Sputtered SrTiO3-Based MIM Capacitors for Above IC Technology

Julie Guillan ST Microelectronics 850, rue Jean Monnet BP16 38926 Crolles cedex, France
,
Gérard Tartavel CEA-LETI, 17 avenue des Martyrs, 38054 Grenoble cedex 7, France
,
Emmanuel Defaÿ CEA-LETI, 17 avenue des Martyrs, 38054 Grenoble cedex 7, France
,
Laurent Ulmer CEA-LETI, 17 avenue des Martyrs, 38054 Grenoble cedex 7, France
,
Ludivine Galéra CEA-LETI, 17 avenue des Martyrs, 38054 Grenoble cedex 7, France
,
Bernard André CEA-LETI, 17 avenue des Martyrs, 38054 Grenoble cedex 7, France
&
Françoise Baume CEA-LETI, 17 avenue des Martyrs, 38054 Grenoble cedex 7, France
 show all
Pages 93-101 | Received 01 Apr 2004, Accepted 01 Apr 2004, Published online: 12 Aug 2010

Citations (16)

Keep up to date with the latest research on this topic with citation updates for this article.

Subscribe to citation updates

Read on this site (1)

F. JOMNI, H. OUAJJI, A. SYLVESTRE, J. GUILLAN, E. DEFAŸ, C. DUBARRY, K. RAOUADI & B. YANGUI. (2008) EFFECT OF ANNEALING ON THE ELECTRICAL PROPERTIES OF SrTiO3 THIN FILMS PRODUCED BY ION BEAM SPUTTERING. Integrated Ferroelectrics 100:1, pages 228-237.
Read now

Articles from other publishers (15)

Emmanuel Tetsi, Gilles Philippot, Isabelle Bord Majek, Cyril Aymonier, Jean Audet, Roxan Lemire, Laurent Bechou & Dominique Drouin. (2018) Ba 0.6 Sr 0.4 TiO 3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors . physica status solidi (a) 215:23, pages 1800478.
Crossref
H. Ouajji, K. Raouadi, B. Yangui & J. Guillan. (2016) Impact of Annealing on the Relaxation Processes in Pt/SrTiO 3 /Pt Thin Film Capacitors . Acta Physica Polonica A 130:3, pages 791-794.
Crossref
Gasidit Panomsuwan, Osamu Takai & Nagahiro Saito. (2012) Enhanced memory window of Au/BaTiO3/SrTiO3/Si(001) MFIS structure with high c-axis orientation for non-volatile memory applications. Applied Physics A 108:2, pages 337-342.
Crossref
G. Panomsuwan, S.‐P. Cho, N. Saito & O. Takai. (2012) Growth and characterization of highly c ‐axis textured SrTiO 3 thin films directly grown on Si(001) substrates by ion beam sputter deposition . Crystal Research and Technology 47:2, pages 187-194.
Crossref
Cheng Zou, Bin Chen, Xiao-Jian Zhu, Zheng-Hu Zuo, Yi-Wei Liu, Yuan-Fu Chen, Qing-Feng Zhan & Run-Wei Li. (2011) Local leakage current behaviours of BiFeO 3 films . Chinese Physics B 20:11, pages 117701.
Crossref
B. Gautier, A. Brugere, O. Ligor, S. Gidon, D. Albertini & A. Descamps-Mandine. (2011) Mesure et cartographie à l’échelle nanométrique des propriétés ferroélectriques et diélectriques des couches minces par les techniques dérivées de la microscopie à force atomique. Matériaux & Techniques 99:4, pages 483-488.
Crossref
Evangéline Bènevent, Kevin Garello, Dominique Cros & Bernard Viala. (2010) High permeability and high permittivity heterostructures for the miniaturization of Radiofrequency components. International Journal of Microwave and Wireless Technologies 1:6, pages 455-460.
Crossref
K. Garello, E. Benevent, J.P. Michel, D. Cros & B. Viala. (2009) Magnetodielectric Thin Film Heterostructure With High Permeability and Permittivity. IEEE Transactions on Magnetics 45:10, pages 4325-4328.
Crossref
S. Blonkowski, E. Defay & X. Biquard. (2009) Sign of the nonlinear dielectric susceptibility of amorphous and crystalline films . Physical Review B 79:10.
Crossref
Y. Rozier, B. Gautier, G. Hyvert, A. Descamps, C. Plossu, C. Dubourdieu & F. Ducroquet. (2009) Nanoscale leakage current measurements in metal organic chemical vapor deposition crystalline SrTiO3 films. Thin Solid Films 517:6, pages 1868-1873.
Crossref
Emmanuel Defaÿ, David Wolozan, Jean-Pierre Blanc, Emmanuelle Serret, Pierre Garrec, Sophie Verrun, Denis Pellissier, Philippe Delpech, Julie Guillan, Bernard André, Laurent Ulmer, Marc Aïd & Pascal Ancey. (2007) High pass filter with above IC integrated SrTiO3 high K MIM capacitors. Solid-State Electronics 51:11-12, pages 1624-1628.
Crossref
A. Ruotolo, C. Y. Lam, W. F. Cheng, K. H. Wong & C. W. Leung. (2007) High-quality all-oxide Schottky junctions fabricated on heavily doped Nb: substrates . Physical Review B 76:7.
Crossref
Maurice Kahn, Christophe Vallée, Emmanuel Defay, Catherine Dubourdieu, Marceline Bonvalot, Serge Blonkowski, Jean-Raoul Plaussu, Pierre Garrec & Thierry Baron. (2007) Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications. Microelectronics Reliability 47:4-5, pages 773-776.
Crossref
Emmanuel Defay, David Wolozan, Pierre Garrec, Bernard Andre, Laurent Ulmer, Marc Aid, Jean-pierre Blanc, Emmanuelle Serret, Philippe Delpech, Jean-christophe Giraudin, Julie Guillan, Denis Pellissier & Pascal Ancey. (2006) Above IC integrated SrTiO3 high K MIM capacitors. Above IC integrated SrTiO3 high K MIM capacitors.
H. Ouajji, A. Sylvestre, E. Defay, K. Raouadi & F. Jomni. (2005) Dielectric properties in Thin Film SrTiO>inf<3>/inf<Capacitor. Dielectric properties in Thin Film SrTiO>inf<3>/inf<Capacitor.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.