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Integrated Ferroelectrics
An International Journal
Volume 11, 1995 - Issue 1-4
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Original Articles

Effects of interfacial roughness on the leakage properties of SrTiO3 thin film capacitors

Yukio Fukuda Texas Instruments Japan Ltd., Inashikigun, Ibaraki, 300–04, Japan
,
Katsuhiro Aoki Texas Instruments Japan Ltd., Inashikigun, Ibaraki, 300–04, Japan
,
Ken Numata Texas Instruments Japan Ltd., Inashikigun, Ibaraki, 300–04, Japan
,
Shintaro Aoyama Texas Instruments Japan Ltd., Inashikigun, Ibaraki, 300–04, Japan
,
Akitoshi Nishimura Texas Instruments Japan Ltd., Inashikigun, Ibaraki, 300–04, Japan
,
Scott Summerfelt Texas Instruments Incorporated, Dallas, TX, 75246, USA
&
Robert Tsu Texas Instruments Incorporated, Dallas, TX, 75246, USA
 show all
Pages 121-127 | Received 22 Mar 1995, Published online: 19 Aug 2006

Citations (10)

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Read on this site (1)

Joon-Hyung Ahn, Gwang-Pyo Choi, Won-Youl Choi, Won-Jae Lee, Soon-Gil Yoon & Ho-Gi Kim. (1998) Effects of bottom electrodes on the leakage properties of sputtered BST thin films. Integrated Ferroelectrics 21:1-4, pages 185-195.
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Articles from other publishers (9)

Koppole C. Sekhar, Kyung Pyo Hong, Sung Hun Key, Chan Su Han, Jun Chul Kim, Dong Soo Kim, Jong Chul Park & Yong Soo Cho. (2013) Enhanced dielectric and tunable characteristics of K-doped Ba0.5Sr0.5TiO3 thin films prepared by pulsed laser deposition. Thin Solid Films 527, pages 267-272.
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Malay M. Samantaray, Abhijit Gurav, Elizabeth C. Dickey & Clive A. Randall. (2011) Electrode Defects in Multilayer Capacitors Part I: Modeling the Effect of Electrode Roughness and Porosity on Electric Field Enhancement and Leakage Current. Journal of the American Ceramic Society 95:1, pages 257-263.
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Yun Ye & Tailiang Guo. (2009) Dielectric properties of Fe-doped Ba0.65Sr0.35TiO3 thin films fabricated by the sol–gel method. Ceramics International 35:7, pages 2761-2765.
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Ken Numata. (2006) Justification of the Schottky emission model at the interface of a precious metal and a perovskite oxide with dilute oxygen vacancies. Thin Solid Films 515:4, pages 2635-2643.
Crossref
M. Nayak, S. Ezhilvalavan & T.Y. Tseng. 2002. Handbook of Thin Films. Handbook of Thin Films 99 167 .
S Ezhilvalavan & Tseung-Yuen Tseng. (2000) Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs. Materials Chemistry and Physics 65:3, pages 227-248.
Crossref
F.M Pontes, E Longo, J.H Rangel, M.I Bernardi, E.R Leite & J.A Varela. (2000) Ba1−xSrxTiO3 thin films by polymeric precursor method. Materials Letters 43:5-6, pages 249-253.
Crossref
Tae-Gyoung In, Sunggi Baik & Sangsub Kim. (2011) Leakage current of Al- or Nb-doped Ba 0.5 Sr 0.5 TiO 3 thin films by rf magnetron sputtering . Journal of Materials Research 13:4, pages 990-994.
Crossref
Y. Fukuda, K. Numata, K. Aoki & A. Nishimura. (1996) Effects of post-annealing on the leakage and dielectric properties of sputter-deposited Pt/Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3//Pt thin film capacitor. Effects of post-annealing on the leakage and dielectric properties of sputter-deposited Pt/Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3//Pt thin film capacitor.

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