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Integrated Ferroelectrics
An International Journal
Volume 11, 1995 - Issue 1-4
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Original Articles

Ferroelectric-based microactuators

William P. Robbins Dept. of Electrical Engineering, University of Minnesota 200 Union St. S. E., Minneapolis, MN, 55455
Pages 179-190 | Received 22 Mar 1995, Published online: 19 Aug 2006

Citations (24)

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Thu Trang Nguyen, M. Detalle, D. Rémiens, L. Lebrun & D. Guyomar. (2008) STUDIES OF SOME DOPANTS: EFFECT OF Mn, Mg, F on (Ba, Sr)PZT FILMS PIEZOELECTRIC RESPONSE FOR SPECIFIC MEMS APPLICATIONS. Integrated Ferroelectrics 96:1, pages 40-50.
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S.S.N. Bharadwaja & S.B. Krupanidhi. (2001) Conduction mechanism in antiferrolectric PbZrO3 thin films—analysis of charge carrier trapping phenomenon. Integrated Ferroelectrics 35:1-4, pages 283-297.
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Articles from other publishers (22)

Xiaojie Wang, Lingjun Zhou, Jinlong Feng, Sheng Wang, Hang Qian, Hao Tong & Xiangshui Miao. (2018) Self-screening induced abnormal stability of ferroelectric phase in GeTe ultrathin films. Applied Physics Letters 113:23.
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V. Batra & S. Kotru. (2017) Illumination effects on the ferroelectric and photovoltaic properties of Pb0.95La0.05Zr0.54Ti0.46O3 thin film based asymmetric MFM structure. Journal of Applied Physics 122:23.
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C. Kügeler, U. Böttger & T. Schneller. (2008) Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications. Applied Physics A 94:4, pages 739-745.
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M. Detalle, D. Rémiens, L. Lebrun & D. Guyomar. (2006) Electrical property evaluation of manganese-fluorine codoping of lead zirconate titanate thin films: Compatibility between hard material and piezoelectric activity. Journal of Applied Physics 100:9.
Crossref
Todd B. Myers, Susmita Bose, Amit Bandyopadhyay & John D. Fraser. 2006. Innovative Processing and Synthesis of Ceramics, Glasses, and Composites V. Innovative Processing and Synthesis of Ceramics, Glasses, and Composites V 187 197 .
P. Venkateswarlu, Apurba Laha & S.B. Krupanidhi. (2005) AC properties of laser ablated La-modified lead titanate thin films. Thin Solid Films 474:1-2, pages 1-9.
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Firas Akasheh, Todd Myers, John D. Fraser, Susmita Bose & Amit Bandyopadhyay. (2004) Development of piezoelectric micromachined ultrasonic transducers. Sensors and Actuators A: Physical 111:2-3, pages 275-287.
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L. Yobas, D.M. Durand, G.G. Skebe, F.J. Lisy & M.A. Huff. (2003) A novel integrable microvalve for refreshable braille display system. Journal of Microelectromechanical Systems 12:3, pages 252-263.
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S Halder & S.B Krupanidhi. (2002) Growth and characterization of Ba(Zr0.1Ti0.9)O3 thin films deposited by pulsed excimer laser ablation. Solid State Communications 122:7-8, pages 429-432.
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P. Venkateswarlu, S.S.N. Bharadwaja & S.B. Krupanidhi. (2001) Study of pulsed laser deposited lead lanthanum titanate thin films. Thin Solid Films 389:1-2, pages 84-90.
Crossref
J. Park, S. Keller, G.P. Carman & H.T. Hahn. (2001) Development of a compact displacement accumulation actuator device for both large force and large displacement. Sensors and Actuators A: Physical 90:3, pages 191-202.
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S.S.N Bharadwaja & S.B Krupanidhi. (2000) Dielectric and dc electrical studies of antiferroelectric lead zirconate thin films. Materials Science and Engineering: B 78:1, pages 1-10.
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C. H. Lin, B. M. Yen, H. C. Kuo, Haydn Chen, T. B. Wu & G. E. Stillman. (2011) Domain structure and electrical properties of highly textured PbZr x Ti 1− x O 3 thin films grown on LaNiO 3 -electrode-buffered Si by metalorganic chemical vapor deposition . Journal of Materials Research 15:1, pages 115-124.
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Quanfang Chen, Da-Jeng Yao, Chang-Jin `CJ' Kim & Greg P. Carman. (1999) Mesoscale actuator device: micro interlocking mechanism to transfer macro load. Sensors and Actuators A: Physical 73:1-2, pages 30-36.
Crossref
Dennis L. PollaLorraine F. Francis. (1998) PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS. Annual Review of Materials Science 28:1, pages 563-597.
Crossref
Quanfang Chen, Da-Jeng Yao, Chang-Jin "CJ" Kim & Greg P. Carman. (2016) Development of Mesoscale Actuator Device with Microinterlocking Mechanism. Journal of Intelligent Material Systems and Structures 9:6, pages 449-457.
Crossref
Venkatraman Gopalan & Terence E. Mitchell. (1998) Wall velocities, switching times, and the stabilization mechanism of 180° domains in congruent LiTaO3 crystals. Journal of Applied Physics 83:2, pages 941-954.
Crossref
D. F. Bahr, J. C. Merlino, P. Banerjee, C. M. Yip & A. Bandyopadhyay. (2011) Reliability and Properties of Pzt Thin Films for Mems Applications. MRS Proceedings 546.
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Quanfang Chen, Da-Jeng Yao, Chang-Jin Kim & G.P. Carman. (1998) Mesoscale actuator device with micro interlocking mechanism. Mesoscale actuator device with micro interlocking mechanism.
C. H. Lin, B. M. Yen, Haydn Chen, T. B. Wu, H. C. Kuo & G. E. Stillman. (2011) Characterization of Highly Textured PZT Thin Films Grown on LaNiO 3 Coated Si Substrates by MOCVD . MRS Proceedings 493.
Crossref
Christopher M. Foster. 1997. Thin Film Ferroelectric Materials and Devices. Thin Film Ferroelectric Materials and Devices 167 197 .
R.C. Ibrahim, T. Sakai, T. Nishida, T. Horiuchi, T. Shiosaki & K. Matsushige. (1996) Fabrication and evaluation of niobium doped lead titanate thin films. Fabrication and evaluation of niobium doped lead titanate thin films.

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