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Integrated Ferroelectrics
An International Journal
Volume 17, 1997 - Issue 1-4
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Drams and materials

High dielectric constant BaxSr1-xTiO3 (BST) thin films made by mocvd techniques for dram applications

Tingkai Li Emcore Corporation, 394 Elizabeth Avenue, NJ, 08873, USA
,
Pete Zawadzki Emcore Corporation, 394 Elizabeth Avenue, NJ, 08873, USA
,
Rick A. Stall Emcore Corporation, 394 Elizabeth Avenue, NJ, 08873, USA
,
Shaohua Liang Dept. Elec. Computer Eng., Rutgers University, Piscataway, NJ, 08854
&
Yicheng Lu Dept. Elec. Computer Eng., Rutgers University, Piscataway, NJ, 08854
Pages 127-139 | Published online: 19 Aug 2006

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Irzaman, Muhammad Dahrul, Brian Yuliarto, Kholoud A. Hammam & Husin Alatas. (2018) Effects of Li and Cu dopants on the crystal structure of Ba0.65Sr0.35TiO3 thin films. Ferroelectrics Letters Section 45:4-6, pages 49-57.
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Articles from other publishers (16)

Chanwoo Park, Chan‐Mi Cho, Bo Keun Park, Chang Seop Hong & Taek‐Mo Chung. (2022) Synthesis and Characterization of New Strontium Complexes with Multidentate Ligands. ChemistrySelect 7:12.
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Kiflom Gebremedhn Kelele, Aschalew Tadesse, Tegene Desalegn, Suresh Ghotekar, Ruthramurthy Balachandran & Hanabe Chowdappa Ananda Murthy. (2021) Synthesis and characterizations of metal ions doped barium strontium titanate (BST) nanomaterials for photocatalytic and electrical applications: A mini review. International Journal of Materials Research 112:8, pages 665-677.
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Chanwoo Park, Jeong Min Hwang, Yongmin Go, Heenang Choi, Bo Keun Park, Chang Gyoun Kim, Ji Yeon Ryu, Chang Seop Hong & Taek-Mo Chung. (2021) Synthesis and Crystal Structures of New Strontium Complexes with Aminoalkoxy and β-Diketonato Ligands. ACS Omega 6:24, pages 15948-15956.
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Zong-Yang Shen, Yu Wang, Yanxue Tang, Yuanying Yu, Wen-Qin Luo, Xingcai Wang, Yueming Li, Zhumei Wang & Fusheng Song. (2019) Glass modified barium strontium titanate ceramics for energy storage capacitor at elevated temperatures. Journal of Materiomics 5:4, pages 641-648.
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D. Shreiber, M. W. Cole, E. Enriquez, S. G. Hirsch, E. Ngo, C. Hubbard, M. Ivill & Chonglin Chen. (2014) Some unusual behavior of dielectric properties of SrTiO3 metal organic chemical vapor deposition grown thin films. Journal of Applied Physics 116:9.
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Zhengang Guo, Liqing Pan, Chong Bi, Hongmei Qiu, Xuedan Zhao, Lihong Yang & M. Yasir Rafique. (2013) Structural and multiferroic properties of Fe-doped Ba0.5Sr0.5TiO3 solids. Journal of Magnetism and Magnetic Materials 325, pages 24-28.
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Shanshan Liu, Beihai Ma, Manoj Narayanan, Sheng Chao, Rachel Koritala & Uthamalingam Balachandran. (2012) Improved properties of barium strontium titanate thin films grown on copper foils by pulsed laser deposition using a self-buffered layer. Journal of Physics D: Applied Physics 45:17, pages 175304.
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G. Shuster, O. Kreinin, E. Lakin, N.P. Kuzmina & E. Zolotoyabko. (2010) MOCVD growth of barium–strontium titanate films using newly developed barium and strontium precursors. Thin Solid Films 518:16, pages 4658-4661.
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Natalia Kuzmina, Irina Malkerova, Andrey Alikhanyan, Dmitry Tsymbarenko, Konstantin Lyssenko, Oleg Kreinin, Gregory Shuster, Evgeny Lakin & Emil Zolotoyabko. (2009) Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium-Strontium-Titanate Films. Chemical Vapor Deposition 15:10â12, pages 342-349.
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Brian Laughlin, Jon Ihlefeld & Jon‐Paul Maria. (2005) Preparation of Sputtered (Ba x ,Sr 1− x )TiO 3 Thin Films Directly on Copper . Journal of the American Ceramic Society 88:9, pages 2652-2654.
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D.J Towner, J Ni, T.J Marks & B.W Wessels. (2003) Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO3 thin films. Journal of Crystal Growth 255:1-2, pages 107-113.
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Brian Laughlin, Jon Ihlefeld & Jon-Paul Maria. (2011) TEM and Electrical Analysis of Sputtered Barium Strontium Titanate (BST) Thin Films on Flexible Copper Substrates. MRS Proceedings 784.
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Sang-Shik Park & Soon-Gil Yoon. (2001) Structure and Electrical Properties of Sputter Deposited (Ba[sub 1−x],Sr[sub x])(Ti[sub 1−y],Zr[sub y])O[sub 3] Thin Films. Journal of The Electrochemical Society 148:8, pages F155.
Crossref
Y. Gao, C. L. Perkins, S. He, P. Alluri, T. Tran, S. Thevuthasan & M. A. Henderson. (2000) Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films. Journal of Applied Physics 87:10, pages 7430-7437.
Crossref
Y. Gao, S. He, P. Alluri, M. Engelhard, A. S. Lea, J. Finder, B. Melnick & R. L. Hance. (2000) Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganic chemical vapor deposition. Journal of Applied Physics 87:1, pages 124-132.
Crossref
Y. Gao, P. Alluri, S. He, M. Engelhard, A.S. Lea, J. Finder, B. Melnick & R. L. Hance. (2011) Surface Roughness and Growth Texture of (Ba,Sr)TiO 3 Thin Films Formed by MOCVD . MRS Proceedings 541.
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