Citations (7)
Keep up to date with the latest research on this topic with citation updates for this article.
Read on this site (2)
N. Izyumskaya, Y.-I. Alivov, S.-J. Cho, H. Morkoç, H. Lee & Y.-S. Kang. (2007) Processing, Structure, Properties, and Applications of PZT Thin Films. Critical Reviews in Solid State and Materials Sciences 32:3-4, pages 111-202.
Read now
Read now
R.F. Schnabel, G. Beitel, G. Mainka, A. Sänger, P. Bosk, Z. Chen, R. Small & C. Dehm. (2000) Patterning of noble metal electrodes and oxygen barriers by CMP. Integrated Ferroelectrics 31:1-4, pages 233-240.
Read now
Read now
Articles from other publishers (5)
Xu Li, Haiping Zhou, Richard J. W. Hill, Martin Holland & Iain G. Thayne. (2012)
A Low Damage Etching Process of Sub-100 nm Platinum Gate Line for III–V Metal–Oxide–Semiconductor Field-Effect Transistor Fabrication and the Optical Emission Spectrometry of the Inductively Coupled Plasma of SF
6
/C
4
F
8
. Japanese Journal of Applied Physics 51:1S, pages 01AB01.
Crossref
Crossref
G. Mainka, G. Beitel, R. F. Schnabel, A. Saenger & C. Dehm. (2001) Chemical Mechanical Polishing of Iridium and Iridium Oxide for Damascene Processes. Journal of The Electrochemical Society 148:10, pages G552.
Crossref
Crossref
R.F. Schnabel, G. Beitel, P. Bosk, C. Dehm, A. Hauser, I. Kasko, G. Mainka, T. Mikolajick, H.D. Mullegger, N. Nagel, M. Rohner, S. Poppa, C. Sama, U. Scheler & V. Weinrich. (2001) Stack capacitor integration with buried oxygen barrier using chemical mechanical polishing of noble metals. Stack capacitor integration with buried oxygen barrier using chemical mechanical polishing of noble metals.
Angus I Kingon & Stephen K Streiffer. (1999) Ferroelectric films and devices. Current Opinion in Solid State and Materials Science 4:1, pages 39-44.
Crossref
Crossref
K. R. Milkove, J. A. Coffin & C. Dziobkowski. (1998) Effects of argon addition to a platinum dry etch process. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16:3, pages 1483-1488.
Crossref
Crossref