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Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
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Device intergration issues and testing

Process and properties of Pt/Pb(Zr, Ti)O3/Pt integrated ferroelectric capacitors

K. Torii Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
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H. Kawakami Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan; Semiconductor Development Center, Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
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H. Miki Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
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K. Kushida Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
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T. Itoga Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
,
Y. Goto Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
,
T. Kumihashi Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
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N. Yokoyama Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
,
M. Moniwa Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
,
K. Shoji Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
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T. Kaga Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
&
Y. Fujisaki Central Research Laboratory Hitachi, Ltd., 1-280 Higashi-koigakubo Kokubunji, Tokyo, 185, Japan
 show all
Pages 21-28 | Received 18 Mar 1996, Published online: 19 Aug 2006

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D. RÉMIENS, LIANG RUIHONG, D. TROADEC, D. DERESMES, C. SOYER, A. DACOSTA & R. DESFEUX. (2008) PIEZOELECTRIC RESPONSE OF PZT NANOSTRUCTURES OBTAINED BY FOCUSED ION BEAM. Integrated Ferroelectrics 100:1, pages 16-25.
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Kazuyoshi Torii, EnricoL. Colla, H.W. Song, AlexanderK. Tagantsev, Kwangsoo No & Nava. Setter. (2001) Size and top electrode-edge effects on fatigue in Pb(Zr,Ti)O3 capacitors with Pt-electrodes. Integrated Ferroelectrics 32:1-4, pages 215-224.
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Kazufumi Suenaga, Kiyoshi Ogata, Hiromichi Waki & Mitsuhiro Mori. (2000) Degradation of Pt/PLZT/Pt capacitors caused by hydrogen in interlayer dielectrics. Integrated Ferroelectrics 31:1-4, pages 323-331.
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Dong-Chun Kim, Hyo-Jin Nam, William Jo, Heon-Min Lee, Seong-Moon Cho, Jong-Uk Bu & Hee-Bok Kang. (1999) Integration of a split word line ferroelectric memory using a novel etching technology. Integrated Ferroelectrics 27:1-4, pages 279-290.
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Kazuyoshi Torii, Yuichi Matsui & Yoshihisa Fujisaki. (1999) Texture control of Pb(Zr, Ti)O3thin films. Integrated Ferroelectrics 25:1-4, pages 223-233.
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Kiyoshi Ogata, Kazufumi Suenaga, Kazuhiko Horikoshi, Keiichi Yoshizumi, Hisayuki Kato & Mitsuhiro Mori. (1999) Effect of grain size on degradation of Pt/PLZT/Pt capacitor. Ferroelectrics 225:1, pages 163-170.
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Elliott Philofsk & Sanjay Mitra. (1998) A qualitative model for degradation of FRAM® products during plastic packaging. Integrated Ferroelectrics 21:1-4, pages 145-153.
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Yoshihisa Fujisaki, Keiko Kushida-Abdelghafar, Hiroshi Miki & Yasuhiro Shimamoto. (1998) Degradation-free ferroelectric Pb(Zr, Ti)O3 thin film capacitors with IrO2 top electrode. Integrated Ferroelectrics 21:1-4, pages 83-95.
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Hiroto Uchida, Nobuyuki Soyama, Kensuke Kageyama, Katsumi Ogi, MikeC. Scott, JoeD. Cuchiaro, LarryD. Mcmillan & CarlosA.Paz De Araujo. (1997) Characterization of self-patterned SBT/SBNT thin films from photo-sensitive solutions. Integrated Ferroelectrics 18:1-4, pages 249-261.
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R. H. Liang, D. Rémiens, D. Deresmes, C. Soyer, D. Troadec, X. L. Dong, L. H. Yang, R. Desfeux, A. Da Costa & J. F. Blach. (2009) Enhancement in nanoscale electrical properties of lead zirconic titanate island fabricated by focused ion beam. Journal of Applied Physics 105:4.
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Y Matsui, Y Nakamura, Y Shimamoto & M Hiratani. (2003) An oxidation barrier layer for metal–insulator–metal capacitors: ruthenium silicide. Thin Solid Films 437:1-2, pages 51-56.
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Jae-Nam Kim, Kwang-Soo Shin, Dae-Hwan Kim, Byung-Ok Park, Nam-Kyoung Kim & Sang-Hee Cho. (2003) Changes in chemical behavior of thin film lead zirconate titanate during Ar+-ion bombardment using XPS. Applied Surface Science 206:1-4, pages 119-128.
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Y. Matsui, M. Hiratani, Y. Nakamura, I. Asano & F. Yano. (2002) Formation and oxidation properties of (Ti1−xAlx)N thin films prepared by dc reactive sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20:3, pages 605-611.
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June Key Lee, Youngsoo Park, Ilsub Chung, Sang Jeong Oh, Dong Jin Jung, Yoon Jong Song, Bon Jae Koo, Sung Yung Lee, Kinam Kim & Seshu B. Desu. (1999) Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O3/Pt ferroelectric capacitors using a wet cleaning method. Journal of Applied Physics 86:11, pages 6376-6381.
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June Key Lee, Tae-Young Kim, Ilsub Chung & Seshu B. Desu. (1999) Characterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O3/Pt ferroelectric capacitor. Applied Physics Letters 75:3, pages 334-336.
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Keiko Kushida-Abdelghafar, Kazuyoshi Torii, Shinichiro Takatani, Yuichi Matsui & Yoshihisa Fujisaki. (2011) Mechanism of TiN barrier-metal oxidation in a ferroelectric random access memory. Journal of Materials Research 13:11, pages 3265-3269.
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Li-Hsin Chang, Elizabeth Apen, Mike Kottke & Clarence Tracy. (1998) A study of platinum electrode patterning in a reactive ion etcher. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16:3, pages 1489-1496.
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Yoshihisa Fujisaki, Keiko Kushida-Abdelghafar, Yasuhiro Shimamoto & Hiroshi Miki. (1997) The effects of the catalytic nature of capacitor electrodes on the degradation of ferroelectric Pb(Zr,Ti)O3 thin films during reductive ambient annealing. Journal of Applied Physics 82:1, pages 341-344.
Crossref

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