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Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
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Device intergration issues and testing

Plasma etch processing of advanced ferroelectric devices

Alferd Cofer Tegal Inc., 2201 S. McDowell Blvd., Petaluma, California, 94955-6020
,
Paritosh Rajora Tegal Inc., 2201 S. McDowell Blvd., Petaluma, California, 94955-6020
,
Steve Deornellas Tegal Inc., 2201 S. McDowell Blvd., Petaluma, California, 94955-6020
&
Doug Keil Tegal Inc., 2201 S. McDowell Blvd., Petaluma, California, 94955-6020
Pages 53-61 | Received 18 Mar 1996, Published online: 19 Aug 2006

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J. Baborowski, P. Muralt, N. Ledermann, E. Colla, A. Seifert, S. Gentil & N. Setter. (2000) Mechanisms of Pb(zr0.53Ti0.47)O3 thin film etching with ECR/RF reactor. Integrated Ferroelectrics 31:1-4, pages 261-271.
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Ryan Keech, Linghan Ye, James L. Bosse, Giovanni Esteves, Jonathon Guerrier, Jacob L. Jones, Marcelo A. Kuroda, Bryan D. Huey & Susan Trolier‐McKinstry. (2017) Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films. Advanced Functional Materials 27:9, pages 1605014.
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Yifang Chen. (2015) Applications of nanoimprint lithography/hot embossing: a review. Applied Physics A 121:2, pages 451-465.
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Nirupam Banerjee & S.B. Krupanidhi. (2013) Low dimensional fabrication of giant dielectric CaCu3Ti4O12 through soft e-beam lithography. Journal of Alloys and Compounds 547, pages 147-151.
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Zhenkui Shen, Zhihui Chen, Qian Lu, Zhijun Qiu, Anquan Jiang, Xinping Qu, Yifang Chen & Ran Liu. (2011) Nano-embossing technology on ferroelectric thin film Pb(Zr0.3,Ti0.7)O3 for multi-bit storage application. Nanoscale Research Letters 6:1.
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Z.K. Shen, Z.H. Chen, H. Li, X.P. Qu, Y. Chen & R. Liu. (2011) Nanoembossing and piezoelectricity of ferroelectric Pb(Zr0.3,Ti0.7)O3 nanowire arrays. Applied Surface Science 257:21, pages 8820-8823.
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Zhenkui Shen, Zhihui Chen, Qian Lu, Anquan Jiang, Zhijun Qiu, Xinping Qu, Yifang Chen & Ran Liu. (2010) Characterizations of nanoembossed Pb(Zr0.3,Ti0.7)O3 ferroelectric films. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 28:6, pages C6M28-C6M31.
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Zixiao Pan, Shuyou Li, Zhaoyu Wang, Min-Feng Yu & Vinayak P. Dravid. (2007) Patterning-controlled morphology of spatially and dimensionally constrained oxide nanostructures. Applied Physics Letters 91:14, pages 143105.
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Zixiao Pan, Nasim Alem, Tao Sun & Vinayak P. Dravid. (2006) Site-Specific Fabrication and Epitaxial Conversion of Functional Oxide Nanodisk Arrays. Nano Letters 6:10, pages 2344-2348.
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D. Ruzmetov, Y. Seo, L. J. Belenky, D.‐M. Kim, X. Ke, H. Sun, V. Chandrasekhar, C.‐B. Eom, M. S. Rzchowski & X. Pan. (2005) Epitaxial Magnetic Perovskite Nanostructures. Advanced Materials 17:23, pages 2869-2872.
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L. Goux, V. Paraschiv, J. G. Lisoni, M. Schwitters, D. Maes, L. Haspeslagh, D. J. Wouters, P. Casella & R. Zambrano. (2005) Influence of Dry-Etch Patterning of Top Electrode and SrBi[sub 2]Ta[sub 2]O[sub 9] on the Properties of Ferroelectric Capacitors. Journal of The Electrochemical Society 152:12, pages C865.
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Paul Muralt, Nicolas Ledermann, Jacek J. Baborowski & Sandrine Gentil. 2002. Materials & Process Integration for MEMS. Materials & Process Integration for MEMS 1 24 .
R Ramesh, S Aggarwal & O Auciello. (2001) Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories. Materials Science and Engineering: R: Reports 32:6, pages 191-236.
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S. Delprat, M. Chaker & J. Margot. (2001) Investigation of the gas pressure influence on patterned platinum etching characteristics using a high-density plasma. Journal of Applied Physics 89:1, pages 29-33.
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Ming-Chung Chiang, Fu-Ming Pan, Han-Chung Cheng, Jeng-Shu Liu, Shih-Hsiung Chan & Ta-Chin Wei. (2000) Dry etching of platinum films with TiN masks in an Ar/O2 helicon wave plasma. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18:1, pages 181-187.
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M. Alexe, C. Harnagea, A. Pignolet, D. Hesse & U. Gösele. 2000. Piezoelectric Materials: Advances in Science, Technology and Applications. Piezoelectric Materials: Advances in Science, Technology and Applications 49 57 .
G. Suchaneck, R. Tews & G. Gerlach. (1999) A model for reactive ion etching of PZT thin films. Surface and Coatings Technology 116-119, pages 456-460.
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A. Stanishevsky. (1998) Focused ion-beam patterning of nanoscale ferroelectric capacitors. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 16:6, pages 3899.
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