Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
Submit an article Journal homepage
85
Views
10
CrossRef citations to date
0
Altmetric
Device intergration issues and testing

Effects of top electrode annealing on the PZT thin films

Eun-G. Lee Dept. Materials Science & Engineering, Chosun University, Kwangju 501-759; SOUTH KOREA IMEC, Kapeldreef 75, B-3001 Leuven, BELGIUM
,
Dirk J. Wouters Dept. Materials Science & Engineering, Chosun University, Kwangju 501-759
,
Geert Willems Dept. Materials Science & Engineering, Chosun University, Kwangju 501-759
&
Herman E. Maes Dept. Materials Science & Engineering, Chosun University, Kwangju 501-759
Pages 165-174 | Received 18 Mar 1996, Published online: 19 Aug 2006

Citations (10)

Keep up to date with the latest research on this topic with citation updates for this article.

Subscribe to citation updates

Read on this site (1)

I. Stolichnov, A. Tagantsev, M. Doebeli & P. Schmuki. (1999) Pt-ion-implantation-induced suppression of leakage conduction in Pt/Pb)(ZrxTi1−x)O3/Pt capacitors. Integrated Ferroelectrics 23:1-4, pages 191-198.
Read now

Articles from other publishers (9)

Wei Shi, Qiang Chen, Lin Chen, Wei Huang, Yi Zhao, Dingquan Xiao & Jianguo Zhu. (2007) Effect of Impurities Pinning on the Domains of PSTZT Ceramics. Effect of Impurities Pinning on the Domains of PSTZT Ceramics.
V. Koval, M. J. Reece & A. J. Bushby. (2007) Enhanced ferroelectric loop asymmetry of lead zirconate titanate thin films under nanoindentation. Journal of Applied Physics 101:2.
Crossref
Wei Shi, Qiang Chen, Dejun Lan, Lin Chen, Wei Huang, Dingquan Xiao & Jianguo Zhu. (2006) Piezoelectric and Ferroelectric Properties of (1-x)Pb(Sc<inf>0.5</inf>Ta<inf>0.5</inf>)O<inf>3</inf>-xPb(Zr<inf>0.52</inf>Ti<inf>0.48</inf>)O<inf>3</inf> Relaxor Ferroelectric Ceramics. Piezoelectric and Ferroelectric Properties of (1-x)Pb(Sc<inf>0.5</inf>Ta<inf>0.5</inf>)O<inf>3</inf>-xPb(Zr<inf>0.52</inf>Ti<inf>0.48</inf>)O<inf>3</inf> Relaxor Ferroelectric Ceramics.
J. Baborowski. 2005. Electroceramic-Based MEMS. Electroceramic-Based MEMS 325 359 .
Kyoung-Tae Kim, Chang-Il Kim & Sung-Gap Lee. (2003) Ferroelectric properties of Pb(Zr,Ti)O3 heterolayered thin films for FRAM applications. Microelectronic Engineering 66:1-4, pages 662-669.
Crossref
B Vilquin, G Le Rhun, R Bouregba, G Poullain & H Murray. (2002) Effect of in situ Pt bottom electrode deposition and of Pt top electrode preparation on PZT thin films properties. Applied Surface Science 195:1-4, pages 63-73.
Crossref
G. Robert, D. Damjanovic & N. Setter. (2000) Preisach modeling of ferroelectric pinched loops. Applied Physics Letters 77:26, pages 4413-4415.
Crossref
Sung-Gap Lee, Kyoung-Tae Kim & Young-Hie Lee. (2000) Characterization of lead zirconate titanate heterolayered thin films prepared on Pt/Ti/SiO2/Si substrate by the sol–gel method. Thin Solid Films 372:1-2, pages 45-49.
Crossref
Dragan Damjanovic. (1998) Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics. Reports on Progress in Physics 61:9, pages 1267-1324.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.