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Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
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Memory devices and charecterization

Ti thickness effects in Pt/Ti bottom electrode on properties of (Ba, Sr)TiO3 thin film

Seon Yong Cha Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusong-dong, Yusong-gu, Taejon, 305-701, Korea
,
Seung Hoon Lee Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusong-dong, Yusong-gu, Taejon, 305-701, Korea
&
Hee Chul Lee Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusong-dong, Yusong-gu, Taejon, 305-701, Korea
Pages 183-190 | Received 18 Mar 1996, Published online: 19 Aug 2006

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Shan Sun, John Belsick, Hiroto Uchida & Tsutomu Atsuki. (1998) Crystallographic orientation control for ferroelectric SBT and SBTN thin films from photosensitive mod solutions. Integrated Ferroelectrics 22:1-4, pages 55-63.
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Articles from other publishers (5)

Hong-Hsin Huang, Moo-Chin Wang, Chung-Yuan Chen, Nan-Chung Wu & Huey-Jiuan Lin. (2006) Characterization of the Ba(SnxTi1−x)O3 thin films prepared by radio frequency magnetron sputtering. Materials Science and Engineering: A 433:1-2, pages 279-285.
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I.A. Souza, A.Z. Simões, S. Cava, L.S. Cavalcante, M. Cilense, E. Longo & J.A. Varela. (2006) Ferroelectric and dielectric properties of thin films grown by the soft chemical method. Journal of Solid State Chemistry 179:10, pages 2972-2976.
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Moo-Chin Wang, Chung-Yi Chen, Chi-Shiung Hsi & Nan-Chung Wu. (2003) Influence of deposition parameters on the dielectric properties of rf magnetron sputtered Ba(ZrxTi1−x)O3 thin films. Journal of the European Ceramic Society 23:13, pages 2307-2314.
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Moo-Chin Wang, Cheng-Chi Tsai, Nan-Chung Wu & Kun-Ming Hung. (2002) Structural and dielectric characterization of the (Ba1−xSrx)(Ti0.9Sn0.1)O3 thin films deposited on Pt/Ti/SiO2/Si substrate by radio frequency magnetron sputtering. Journal of Applied Physics 92:4, pages 2100-2107.
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Moo-Chin Wang, Cheng-Chi Tsai, Kun-Ming Hung & Nan-Chung Wu. (2002) Preparation and characterization of (Ba1−xSrx)(Ti0.9Sn0.1)O3 thin films deposited on Pt/Ti/SiO2/Si substrate by RF magnetron sputtering. Journal of Crystal Growth 241:4, pages 439-447.
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