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Integrated Ferroelectrics
An International Journal
Volume 14, 1997 - Issue 1-4
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Materials processing - CVD

Electrical and microstructural properties of SrTiO3 thin films deposited by metalorganic chemical vapor deposition

Ho Jin Cho School of Materials Science and Engineering, Seoul National University, Seoul, 151-742, Korea
,
Jong Myeong Lee School of Materials Science and Engineering, Seoul National University, Seoul, 151-742, Korea
,
Ju Cheol Shin School of Materials Science and Engineering, Seoul National University, Seoul, 151-742, Korea
&
Hyeong Joon Kim School of Materials Science and Engineering, Seoul National University, Seoul, 151-742, Korea
Pages 115-122 | Received 18 Mar 1996, Published online: 19 Aug 2006

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Wenhui Ma, Patrick Schäfer, Peter Ehrhart & Painer Waser. (2000) Metalorganic chemical vapor deposition of BaTiO3 and SrTiO3 thin films using a single solution source with a non-contact vaporizer. Integrated Ferroelectrics 30:1-4, pages 139-148.
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Articles from other publishers (5)

D. Shreiber, M. W. Cole, E. Enriquez, S. G. Hirsch, E. Ngo, C. Hubbard, M. Ivill & Chonglin Chen. (2014) Some unusual behavior of dielectric properties of SrTiO3 metal organic chemical vapor deposition grown thin films. Journal of Applied Physics 116:9.
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Soon Yon Park, Jongwan Choi & Kwangsoo No. (2001) The effects of Sr/Ti ratio on the step coverage of SrTiO/sub 3/ thin films fabricated using ECR-PEMOCVD. The effects of Sr/Ti ratio on the step coverage of SrTiO/sub 3/ thin films fabricated using ECR-PEMOCVD.
Y. Gao, C. L. Perkins, S. He, P. Alluri, T. Tran, S. Thevuthasan & M. A. Henderson. (2000) Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films. Journal of Applied Physics 87:10, pages 7430-7437.
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J. F. Scott. (1998) HIGH-DIELECTRIC CONSTANT THIN FILMS FOR DYNAMIC RANDOM ACCESS MEMORIES (DRAM). Annual Review of Materials Science 28:1, pages 79-100.
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Ho Jin Cho & Hyeong Joon Kim. (1998) Improvement of dielectric properties of (Ba,Sr)TiO3 thin films deposited by pulse injection chemical vapor deposition. Applied Physics Letters 72:7, pages 786-788.
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