Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 14, 1997 - Issue 1-4
Submit an article Journal homepage
135
Views
45
CrossRef citations to date
0
Altmetric
Materials processing - PVD

Deposition of self-polarized PZT films by planar multi-target sputtering

Rainer Bruchhaus SIEMENS AG, ZFE T MR 2, D-81730, Munich, Germany
,
Dana Pitzer SIEMENS AG, ZFE T MR 2, D-81730, Munich, Germany
,
Robert Primig SIEMENS AG, ZFE T MR 2, D-81730, Munich, Germany
,
Wolfram Wersing SIEMENS AG, ZFE T MR 2, D-81730, Munich, Germany
&
Yuqing Xu SIEMENS AG, ZFE T MR 2, D-81730, Munich, Germany; Zhejiang University, Hangzhou, 310027, P. R. China
Pages 141-149 | Received 18 Mar 1996, Published online: 19 Aug 2006

Citations (45)

Keep up to date with the latest research on this topic with citation updates for this article.

Subscribe to citation updates

Read on this site (9)

G. SUCHANECK, WEN-MEI LIN, G. GERLACH, A. DEYNEKA & L. JASTRABIK. (2006) MULTI-TARGET REACTIVE SPUTTER DEPOSITION OF LEAD-ENRICHED Pb(Zr,Ti)O3 THIN FILMS. Integrated Ferroelectrics 80:1, pages 189-195.
Read now
G. Suchaneck & G. Gerlach. (2006) Ferroelectric Thin Films: Deposition, Advanced Film Characterization and Novel Device Concepts. Ferroelectrics 335:1, pages 137-148.
Read now
A. Deyneka, G. Suchaneck, L. Jastrabik & G. Gerlach. (2004) Phase Transition Shift in Lead-Excess PZT Films Under UV Illumination. Integrated Ferroelectrics 67:1, pages 173-180.
Read now
G. SUCHANECK, A. DEYNEKA, L. JASTRABIK & G. GERLACH. (2004) Stability of Space Charge Compensated Ferroelectrics. Integrated Ferroelectrics 62:1, pages 55-60.
Read now
Christian Erich Zybill, Markus Vogel, Khaled Karrai, Armin Kriele & Heribert Lorenz. (2001) Activation of single domains in (111) PZT and (100) SBT. Integrated Ferroelectrics 32:1-4, pages 151-158.
Read now
R. Bruchhaus, D. Pitzer, R. Primig, M. Schreiter & W. Wersing. (1999) Sputtering of PZT thin films for surface micromachined IR-detector arrays. Integrated Ferroelectrics 25:1-4, pages 1-11.
Read now
Markus Kohli & Paul Muralt. (1999) Poling of ferroelectric thin films. Ferroelectrics 225:1, pages 155-162.
Read now
R. Bruchhaus, D. Pitzer, R. Primig, M. Schreiter & W. Wersing. (1998) PZT thin films grown by multi-target sputtering: Analysis of thin film stress. Integrated Ferroelectrics 21:1-4, pages 461-467.
Read now
A.L. Kholkin, K.G. Brooks, D.V. Taylor, S. Hiboux & N. Setter. (1998) Self-polarization effect in Pb(Zr,Ti)O3 thin films. Integrated Ferroelectrics 22:1-4, pages 525-533.
Read now

Articles from other publishers (36)

Preecha Changyom, Komgrit Leksakul, Dheerawan Boonyawan, Pongsawat Premphet & Norrapon Vichiansan. (2023) Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system. Heliyon 9:11, pages e22247.
Crossref
Radhouane Bel-Hadj-Tahar. (2017) Morphological and electrical investigations of lead zirconium titanate thin films processed at low temperature by a novel sol-gel system. Journal of Alloys and Compounds 729, pages 607-616.
Crossref
T. David Binnie, A. F. Armitage & Piotr Wojtczuk. (2017) A passive infrared gesture recognition system. A passive infrared gesture recognition system.
I. Pintilie, L. Trinca, L. Trupina, I. Pasuk & L. Pintilie. (2017) Relation between domain structure and pyroelectric response in as-grown epitaxial Pb(Zr 0.2 Ti 0.8 )O 3 thin films on substrates with different resistivity. Materials Research Bulletin 93, pages 201-207.
Crossref
Jinyan Zhao, Wei Ren, Gang Niu, Nan Zhang, Guohua Dong, Lingyan Wang, Ming Liu, Peng Shi & Zuo-Guang Ye. (2017) Recoverable Self-Polarization in Lead-Free Bismuth Sodium Titanate Piezoelectric Thin Films. ACS Applied Materials & Interfaces 9:34, pages 28716-28725.
Crossref
K.K. Maurya, S.K. Halder, Suchitra Sen, Ankita Bose & Sandip Bysakh. (2014) High resolution X-ray and electron microscopy characterization of PZT thin films prepared by RF magnetron sputtering. Applied Surface Science 313, pages 196-206.
Crossref
LINGYAN WANG, WEI REN, PHOI CHIN GOH, KUI YAO, PENG SHI & XIAOQING WU. (2013) THICKNESS-DEPENDENCE OF RESIDUAL STRESS IN LEAD-FREE FERROELECTRIC K 0.5 Na 0.5 NbO 3 FILMS . Journal of Advanced Dielectrics 02:04, pages 1250021.
Crossref
Meng Qin, Kui Yao & Yung C. Liang. (2010) Development of low-cost ferroelectric PLZT devices for photovoltaic power generation. Development of low-cost ferroelectric PLZT devices for photovoltaic power generation.
Alexandr Dejneka, Ilze Aulika, Vladimir Trepakov, Jaromir Krepelka, Lubomir Jastrabik, Zdenek Hubicka & Anna Lynnyk. (2009) Spectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitations. Optics Express 17:16, pages 14322.
Crossref
S. Corkovic, R. W. Whatmore & Q. Zhang. (2008) Development of residual stress in sol-gel derived Pb(Zr,Ti)O3 films: An experimental study. Journal of Applied Physics 103:8.
Crossref
Walter Heywang, Karl Lubitz & Wolfram WersingP. Muralt. 2008. Piezoelectricity. Piezoelectricity 351 376 .
Gunnar Suchaneck, Alexander Deyneka, Lubomir Jastrabik & Gerald Gerlach. (2006) Relaxor-Like Behavior of Self-Polarized Pb(Zr,Ti)O<sub>3</sub> Thin Films. Materials Science Forum 514-516, pages 175-178.
Crossref
J. Pérez, P.M. Vilarinho, A.L. Kholkin, J. Manuel Herrero & C. Zaldo. (2005) Effect of Processing Conditions on the Piezoelectric Properties of Sol-gel Derived Pb(Zr,Ti)O 3 Films for Micromechanical Applications . Journal of Materials Research 20:6, pages 1428-1435.
Crossref
V. V. Shvartsman, N. A. Pertsev, J. M. Herrero, C. Zaldo & A. L. Kholkin. (2005) Nonlinear local piezoelectric deformation in ferroelectric thin films studied by scanning force microscopy. Journal of Applied Physics 97:10.
Crossref
G. Suchaneck, A.V. Solnyshkin, A. Suchaneck & G. Gerlach. (2005) Polarization profiling of metal-ferroelectric-semiconductor structures by LIMM. Journal of the European Ceramic Society 25:12, pages 2369-2372.
Crossref
G. Suchaneck, A.V. Solnyshkin, D.A. Kiselev, A.A. Bogomolov & G. Gerlach. (2005) The LIMM problem for ferroelectric thin films comprising space charge layers. Journal of the European Ceramic Society 25:12, pages 2363-2368.
Crossref
P. Muralt. 2005. Electroceramic-Based MEMS. Electroceramic-Based MEMS 81 113 .
Kinam Kim & Yoon J. Song. (2003) Integration technology for ferroelectric memory devices. Microelectronics Reliability 43:3, pages 385-398.
Crossref
I. K. Bdikin, V. V. Shvartsman, A. L. Kholkin & Seung-Hyun Kim. (2011) Ferroelectric Domain Structure and Local Piezoelectric Properties of Sol-Gel Derived Pb(Zr 1-x Ti x )O 3 Films . MRS Proceedings 784.
Crossref
G Suchaneck, W.-M Lin, R Koehler, T Sandner, G Gerlach, R Krawietz, W Pompe, A Deineka & L Jastrabik. (2002) Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays. Vacuum 66:3-4, pages 473-478.
Crossref
Gunnar Suchaneck, Gerald Gerlach, Alexander Deyneka, Lubomir Jastrabik, Sulkhan T. Davitadze & Boris A. Strukov. (2011) Phase transitions of self-polarized PZT thin films. MRS Proceedings 718.
Crossref
Paul Muralt. (2001) Micromachined infrared detectors based on pyroelectric thin films. Reports on Progress in Physics 64:10, pages 1339-1388.
Crossref
A.L Kholkin, A Gruverman, A Wu, M Avdeev, P.M Vilarinho, I.M Miranda Salvado & J.L Baptista. (2001) Seeding effect on micro- and domain structure of sol–gel-derived PZT thin films. Materials Letters 50:4, pages 219-224.
Crossref
Vladimir N. Leonov & Donald P. Butler. (2001) Two-color thermal detector with thermal chopping for infrared focal-plane arrays. Applied Optics 40:16, pages 2601.
Crossref
Carol Thompson, A. Munkholm, S. K. Streiffer, G. B. Stephenson, K. Ghosh, J. A. Eastman, O. Auciello, G.-R. Bai, M. K. Lee & C. B. Eom. (2001) X-ray scattering evidence for the structural nature of fatigue in epitaxial Pb(Zr, Ti)O3 films. Applied Physics Letters 78:22, pages 3511-3513.
Crossref
A. Gruverman, A. Kholkin, A. Kingon & H. Tokumoto. (2001) Asymmetric nanoscale switching in ferroelectric thin films by scanning force microscopy. Applied Physics Letters 78:18, pages 2751-2753.
Crossref
P. Muralt. (2000) PZT thin films for microsensors and actuators: Where do we stand?. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 47:4, pages 903-915.
Crossref
N. Setter & R. Waser. (2000) Electroceramic materials. Acta Materialia 48:1, pages 151-178.
Crossref
E. Cattan, T. Haccart & D. Rémiens. (1999) e 31 piezoelectric constant measurement of lead zirconate titanate thin films. Journal of Applied Physics 86:12, pages 7017-7023.
Crossref
G. Suchaneck, R. Koehler, P. Padmini, T. Sandner, J. Frey & G. Gerlach. (1999) Self-polarization control of radio-frequency-sputtered lead zirconate titanate films. Surface and Coatings Technology 116-119, pages 1238-1243.
Crossref
Bon Jae Koo, Yoon Jong Song, Sung Yung Lee, Dong Jin Jung, Byung Hee Kim, Kinam Kim, Youngsoo Park & June Key Lee. (1999) Deposition-temperature-dependent stress of capping oxide and its effect on Pt/Pb(Zr1−xTix)O3/Pt ferroelectric capacitor. Applied Physics Letters 74:16, pages 2286-2288.
Crossref
A. E. Romanov, A. Vojta, W. Pompe, M. J. Lefevre & J. S. Speck. (1999) Domain Patterns in (111) Oriented Tetragonal Ferroelectric Films. physica status solidi (a) 172:1, pages 225-253.
Crossref
G. Vélu & G. Rèmiens. (1999) Dielectric and ferroelectric properties of Perovskite Pb(Zr, Ti)O3 films deposited by sputtering on Si substrate. Microelectronics Reliability 39:2, pages 241-250.
Crossref
G. Suchaneck, T. Sandner, R. Kohler, P. Padmini, G. Gerlach, V.P. Afanasjev & E.A. Tarakanov. (1998) The spatial distribution of polarization and space charge in sputtered PZT thin films. The spatial distribution of polarization and space charge in sputtered PZT thin films.
M. Schreiter, R. Bruchhaus, D. Pitzer & W. Wersing. (1998) Sputtering of self-polarized PZT films for IR-detector arrays. Sputtering of self-polarized PZT films for IR-detector arrays.
Yimin Liu & Pradeep P. Phule. (2005) Sequence of Phase Formation in Chemically Derived Ferroelectric Lead Zirconate Titanate Pb(Zr0.4Ti0.6)O3 Thin Films. Journal of the American Ceramic Society 80:9, pages 2410-2412.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.