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Integrated Ferroelectrics
An International Journal
Volume 18, 1997 - Issue 1-4
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Chemical solution deposition

Sol-gel derived RuO2-PZT-RuO2 ferroelectric capacitors

G. Teowee Donnelly Corporation, 4545 East Fort Lowell Road, Tucson, AZ, 85712
,
J. M. Boulton Donnelly Corporation, 4545 East Fort Lowell Road, Tucson, AZ, 85712
,
S. Hassan Donnelly Corporation, 4545 East Fort Lowell Road, Tucson, AZ, 85712
,
K. Mccarthy Donnelly Corporation, 4545 East Fort Lowell Road, Tucson, AZ, 85712
,
F. Mccarthy Donnelly Corporation, 4545 East Fort Lowell Road, Tucson, AZ, 85712
,
T. J. Bukowski Donnelly Corporation, 4545 East Fort Lowell Road, Tucson, AZ, 85712
,
T. P. Alexander Department of Materials Science and Engineering, University of Arizona, Tucson, AZ, 85721
&
D. R. Uhlmann Department of Materials Science and Engineering, University of Arizona, Tucson, AZ, 85721
 show all
Pages 287-295 | Published online: 19 Aug 2006

Citations (6)

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Read on this site (1)

J.H. Yi, R. Seveno & H.W. Gundel. (1999) Sol-gel derived PZT/RuO2 multilayer films on stainless steel substrates. Integrated Ferroelectrics 23:1-4, pages 199-214.
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Articles from other publishers (5)

Martina Angermann, Georg Jakopic, Christine Prietl, Thomas Griesser, Klaus Reichmann & Marco Deluca. (2023) Highly conductive RuO2 thin films from novel facile aqueous chemical solution deposition. Journal of Sol-Gel Science and Technology 108:3, pages 575-587.
Crossref
Wei Cao & Sandwip K. Dey. (2007) Microstructure and properties of sol-gel derived Pb(Zr0.3Ti0.7)O3 thin films on GaN/sapphire for nanoelectromechanical systems. Journal of Sol-Gel Science and Technology 42:3, pages 389-395.
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S. Bhaskar, P. S. Dobal, S. B. Majumder & R. S. Katiyar. (2001) X-ray photoelectron spectroscopy and micro-Raman analysis of conductive RuO2 thin films. Journal of Applied Physics 89:5, pages 2987-2992.
Crossref
S. Bhaskar, P. S. Dobal, S. B. Majumder & R. S. Katiyar. (2011) Characterization of Conductive RuO 2 Thin Film as Bottom electrodes for Ferroelectric Thin Films . MRS Proceedings 655.
Crossref
S. Bhaskar, S. B. Majumder, P. S. Dobal, R. S. Katiyar, A. L. M. Cruz & E. R. Fachini. (2011) Effect of Precursor Sol Ageing on Sol-Gel Derived Ruthenium Oxide Thin Films. MRS Proceedings 606.
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