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Integrated Ferroelectrics
An International Journal
Volume 21, 1998 - Issue 1-4
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Session 5. Materials Processing-PVD

PZT capacitors using IrO2 electrode by RF magnetron sputtering

Kwon Hong Semiconductor Research Division, HYUNDAI Electronics Industries Co., Ltd., Bubal-eup, Ichon-si, Kyungki-do, 467-701, Korea
,
In Kyu You Semiconductor Research Division, HYUNDAI Electronics Industries Co., Ltd., Bubal-eup, Ichon-si, Kyungki-do, 467-701, Korea
,
Yong Sik Yu Semiconductor Research Division, HYUNDAI Electronics Industries Co., Ltd., Bubal-eup, Ichon-si, Kyungki-do, 467-701, Korea
&
Sahang Kyoo Lee Semiconductor Research Division, HYUNDAI Electronics Industries Co., Ltd., Bubal-eup, Ichon-si, Kyungki-do, 467-701, Korea
Pages 511-519 | Received 17 Apr 1998, Accepted 05 Jun 1998, Published online: 19 Aug 2006

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Soon-Gil Yoon, A.I. Kingon & Seung-Hyun Kim. (2001) Electrical properties of Pb1-xLax(ZryTi1-y)1-x/4O3 thin films with various iridium-based top electrodes. Integrated Ferroelectrics 33:1-4, pages 155-164.
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Articles from other publishers (6)

Xuepei Yuan, Yuichi Matsuyama & T. C. Mike Chung. (2010) Synthesis of Functionalized Isotactic Polypropylene Dielectrics for Electric Energy Storage Applications. Macromolecules 43:9, pages 4011-4015.
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Soon-Gil Yoon & A. I. Kingon. (2001) Recovery Characteristics of Hydrogen-Damaged  ( Pb , La )  ( Zr , Ti )  O  3 Capacitors with Pt and IrO 2 Top Electrodes . Journal of The Electrochemical Society 148:7, pages F137-F139.
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Soon-Gil Yoon, Dwi Wicaksana, Dong-Joo Kim, Seung-Hyun Kim & A. I. Kingon. (2011) Effect of hydrogen on true leakage current characteristics of (Pb,La)(Zr,Ti)O 3 thin-film capacitors with Pt- or Ir-based top electrodes . Journal of Materials Research 16:4, pages 1185-1189.
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Soon-Gil Yoon, D. Wicaksana, Dong-Joo Kim, Seung-Hyun Kim & A.I. Kingon. (2001) Effect of hydrogen on (Pb,La)(Zr,Ti)O/sub 3/ (PLZT) thin film capacitors with Pt or Ir-based top electrodes. Effect of hydrogen on (Pb,La)(Zr,Ti)O/sub 3/ (PLZT) thin film capacitors with Pt or Ir-based top electrodes.
Soon-Gil Yoon, A. I. Kingon & Seung-Hyun Kim. (2000) Relaxation and leakage current characteristics of Pb1−xLax(ZryTi1−y)1−x/4O3 thin films with various Ir-based top electrodes. Journal of Applied Physics 88:11, pages 6690-6695.
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Kwon Hong, Yong Sik Yu & Shang Kyoo Lee. (2011) Effect of Bottom Electrode System on Ferroelectric Properties of Sputter Deposited PZT Capacitors. MRS Proceedings 541.
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