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Integrated Ferroelectrics
An International Journal
Volume 26, 1999 - Issue 1-4
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Section I: Materials processing – chemical solution deposition

Microstructure evolution and leakage phenomena of CSD PLZT thin films

Mitsushi Fujiki Materials & Materials Engineering Lab., Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 2430197, JAPAN
,
Jeffrey S. Cross Materials & Materials Engineering Lab., Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 2430197, JAPAN
,
Mineharu Tsukada Materials & Materials Engineering Lab., Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 2430197, JAPAN
,
Seigen Otani Materials & Materials Engineering Lab., Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 2430197, JAPAN
,
Yasutoshi Kotaka Materials & Materials Engineering Lab., Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 2430197, JAPAN
,
Yasuyuki Goto Materials & Materials Engineering Lab., Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 2430197, JAPAN
,
Katsuyoshi Matsuura Advanced Material & FeRAM Development Department, Technology Development Division, Fujitsu Ltd., 4-2 Nishinemoriyama, Kanagasaki-cho, Iwate, 0294593, JAPAN
&
Hiroshi Ashida Advanced Material & FeRAM Development Department, Technology Development Division, Fujitsu Ltd., 4-2 Nishinemoriyama, Kanagasaki-cho, Iwate, 0294593, JAPAN
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Pages 269-275 | Received 07 Mar 1999, Published online: 19 Aug 2006

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Read on this site (2)

Nobuyuki Soyama, Kazunari Maki, Satoru Mori & Katsumi Ogi. (2001) Improvement of process stability for PZT thin films formation by using modified SOL-GEL solutions. Integrated Ferroelectrics 33:1-4, pages 227-234.
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Kazunari Maki, Nobuyuki Soyama, Kaoru Nagamine, Satoru Mori & Katsumi Ogi. (2001) Preparation and evaluation of sub-100 nm Pb(Zr,Ti)O3 films derived from modified sol-gel solutions for low-voltage operation of feram. Integrated Ferroelectrics 39:1-4, pages 223-230.
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Articles from other publishers (1)

N. Soyama, K. Maki, S. Mori & K. Ogi. (2001) Preparation of PZT thin films for low voltage application by sol-gel method. Preparation of PZT thin films for low voltage application by sol-gel method.

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