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Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals Volume 280, 1996 - Issue 1

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Session V: Fabrication and Applications

Autocatalytic Decomposition of A β-Tosyloxy-Ketone Acetal as an Acid Amplifier

Kazuaki Kudo Research Laboratory of Resources Utilization, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226, Japan

Koji Arimitsu Research Laboratory of Resources Utilization, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226, Japan

Kunihiro Ichimura Research Laboratory of Resources Utilization, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama, 226, Japan

Pages 307-312 | Published online: 04 Oct 2006

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https://doi.org/10.1080/10587259608040348

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Shinya Fujii, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa & Toshiro Itani. (2017) Sensitivity enhancement of chemically amplified EUV resists by adding acid-generating promoters. Japanese Journal of Applied Physics 56:6S1, pages 06GD01.
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K. Arimitsu, S. Amano & M. Furutani. (2016) Acid-amplifying microcapsules: preparation, characterization, and application to cationic UV curing. RSC Advances 6:10, pages 7893-7896.
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Kazuyuki Enomoto, Koji Arimitsu, Atsutaro Yoshizawa, Ravi Joshi, Hiroki Yamamoto, Akihiro Oshima, Takahiro Kozawa & Seiichi Tagawa. (2012) Acid Generation Mechanism for Extreme Ultraviolet Resists Containing Pinanediol Monosulfonate Acid Amplifiers: A Pulse Radiolysis Study. Japanese Journal of Applied Physics 51:4R, pages 046502.
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Akira Igarashi, Koji Arimitsu, Takahiro Seki & Kunihiro Ichimura. (2008) Novel base-sensitive polymers generating amino groups from their side chains in a nonlinear manner and their application to photoimaging materials. J. Mater. Chem. 18:5, pages 560-566.
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Kunihiro Ichimura. (2002) Nonlinear organic reactions to proliferate acidic and basic molecules and their applications. The Chemical Record 2:1, pages 46-55.
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Sang-Wook Park, Koji Arimitsu, Sungeun Lee & Kunihiro Ichimura. (2000) A Novel Photoresist Based on Polymeric Acid Amplifiers. Chemistry Letters 29:9, pages 1036-1037.
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Yoshio Kawai. (2000) Journal of Photopolymer Science and Technology Awards. Journal of Photopolymer Science and Technology 13:1, pages 7-9.
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Kazuaki Kudo, Koji Arimitsu, Hironori Ohmori, Hiromitsu Ito & Kunihiro Ichimura. (1999) Acid Proliferation Processes of 3-Phenyl-3,3-ethylenedioxypropyl Sulfonates in Photosensitive Polymer Films Leading to “Air Infection”. Chemistry of Materials 11:8, pages 2126-2131.
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Koji Arimitsu & Kunihiro Ichimura. (1998) Trioxane Derivative as an Acid Amplifier Exhibiting a Non-linear Organic Reaction. Chemistry Letters 27:8, pages 823-824.
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Koji Arimitsu, Kazuaki Kudo & Kunihiro Ichimura. (1998) Autocatalytic Fragmentation of Acetoacetate Derivatives as Acid Amplifiers to Proliferate Acid Molecules. Journal of the American Chemical Society 120:1, pages 37-45.
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Autocatalytic Decomposition of A β-Tosyloxy-Ketone Acetal as an Acid Amplifier

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Autocatalytic Decomposition of A β-Tosyloxy-Ketone Acetal as an Acid Amplifier

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