Advanced search
Publication Cover
Nondestructive Testing and Evaluation Volume 12, 1996 - Issue 6
Submit an article Journal homepage
12
Views
6
CrossRef citations to date
0
Altmetric
Original Articles

ON-LINE FIBRE OPTIC BASED INSPECTION USING CHROMATIC MODULATION FOR SEMICONDUCTOR MATERIALS PROCESSING

P. C. Russell Department of Electrical Engineering and Electronics, The University of Liverpool, PO Box 147, Liverpool, L69 3BX;
,
D. Alston Department of Electrical Engineering and Electronics, The University of Liverpool, PO Box 147, Liverpool, L69 3BX;
,
V. Smith Department of Electrical Engineering and Electronics, The University of Liverpool, PO Box 147, Liverpool, L69 3BX;
,
G. R. Jones Department of Electrical Engineering and Electronics, The University of Liverpool, PO Box 147, Liverpool, L69 3BX;
&
P. HUGGETI Chell Technologies, Greatworth Park, Banbury, Northamptonshire, NNll 5RB
Pages 379-389 | Published online: 26 Apr 2007

Citations (6)

Keep up to date with the latest research on this topic with citation updates for this article.

Subscribe to citation updates

Read on this site (1)

R.J. YU, P.J.G. LISBOA, P.C. RUSSELL & G.R. JONES. (1997) RESOLUTION CAPABILITIES OF CHROMATIC SENSING IN THE MONITORING OF SEMICONDUCTOR PLASMA PROCESSING SYSTEMS. Nondestructive Testing and Evaluation 13:6, pages 347-360.
Read now

Articles from other publishers (5)

B Djakov, G Jones & Y Yokomizu. 2008. Chromatic Monitoring of Complex Conditions. Chromatic Monitoring of Complex Conditions.
P.C. Russell, B.E. Djakov, R. Enikov, D.H. Oliver, Y. Wen & G.R. Jones. (2003) Monitoring plasma jets containing micro particles with chromatic techniques. Sensor Review 23:1, pages 60-65.
Crossref
P.C. Russell & G.R. Jones. (2000) Chromatic monitoring of plasma and plasma systems. Vacuum 58:2-3, pages 88-99.
Crossref
K.J. Brazier, P.C. Russell, G.R. Jones & I. Shankland. (2000) A statistical approach to economical camera‐based colorimetric comparison. Sensor Review 20:1, pages 43-49.
Crossref
G. R. Jones, R. E. Jones & R. Jones. 2000. Optical Fiber Sensor Technology. Optical Fiber Sensor Technology 1 77 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.