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Letters section

Electronic and optical properties of glow-discharge amorphous silicon-carbon alloys

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Pages 489-501 | Received 23 Sep 1983, Accepted 05 Nov 1983, Published online: 20 Aug 2006

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R. Reitano, A. Baeri & G. Foti. (2001) Light-induced creation of metastable defects in hydrogenated amorphous silicon carbide. Philosophical Magazine B 81:6, pages 629-636.
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Giuseppina Ambrosone, Pio Capezzuto, Sergio Catalanotti, Ubaldo Coscia & Salvatore Mormone. (2000) Optical, electrical and structural properties of hydrogenated amorphous Si-C alloys deposited by different hydrocarbon gas mixtures. Philosophical Magazine B 80:4, pages 497-506.
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I. Nakaaki, N. Saito, Y. Inui, S. Yoshioka & S. Nakamura. (1993) Enhancement of photoconductivity in r.f. glow-discharge-deposited a-SiC: H films doped with nitrogen. Philosophical Magazine B 68:1, pages 55-65.
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N. Saito, Y. Tomioka, H. Senda, T. Yamaguchi & K. Kawamura. (1990) Doping effects of aluminium on the properties of hydrogenated amorphous silicon–carbon alloy films prepared by magnetron sputtering. Philosophical Magazine B 62:5, pages 527-536.
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S.H. Baker, W.E. Spear & R.A. G. Gibson. (1990) Electronic and optical properties of a-Si1-xCx films prepared from a H2-diluted mixture of SiH4 and CH4 . Philosophical Magazine B 62:2, pages 213-223.
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M. Meaudre & R. Meaudre. (1987) Influence of nitrogen incorporation on the density of gap states in amorphous hydrogenated silicon. Philosophical Magazine B 55:3, pages 417-426.
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N. Saito, T. Yamada, T. Yamaguchi, I. Nakaaki & N. Tanaka. (1985) Structural, optical and electronic properties of amorphous SiC: H alloys prepared by magnetron sputtering of silicon in methane-argon gas mixtures. Philosophical Magazine B 52:5, pages 987-995.
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M.P. Schmidt, J. Bullot, M. Gauthier, P. Cordier, I. Solomon & H. Tran-Quoc. (1985) Influence of carbon incorporation in amorphous hydrogenated silicon. Philosophical Magazine B 51:6, pages 581-589.
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José Herrera-Celis, Claudia Reyes-Betanzo, Adrián Itzmoyotl-Toxqui, Abdu Orduña-Díaz & Ana Pérez-Coyotl. (2015) a -SixC1−x:H thin films with subnanometer surface roughness for biological applications . Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 33:5.
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Wei Yu, Wanbing Lu, Li Han & Guangsheng Fu. (2004) Structural and optical properties of hydrogenated amorphous silicon carbide films by helicon wave plasma-enhanced chemical vapour deposition. Journal of Physics D: Applied Physics 37:23, pages 3304-3308.
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M.N.P. Carre?o & A.T. Lopes. (2004) Self-sustained bridges of a-SiC:H films obtained by PECVD at low temperatures for MEMS applications. Journal of Non-Crystalline Solids 338-340, pages 490-495.
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K. Chew, Rusli, S. F. Yoon, J. Ahn, V. Ligatchev, E. J. Teo, T. Osipowicz & F. Watt. (2002) Hydrogenated amorphous silicon carbide deposition using electron cyclotron resonance chemical vapor deposition under high microwave power and strong hydrogen dilution. Journal of Applied Physics 92:5, pages 2937-2941.
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N. Saito, I. Nakaaki, S. Nakamura, S. Yoshioka & T. Yamaguchi. (2001) Properties of amorphous ternary alloy films a-SixCyGez:H prepared by magnetron co-sputtering. Applied Surface Science 169-170, pages 472-475.
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Tianfu Ma, Jun Xu, Jiafang Du, Wei Li, Xinfan Huang & Kunji Chen. (2000) Full color light emission from amorphous SiCx:H with organic–inorganic structures. Journal of Applied Physics 88:11, pages 6408-6412.
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J. Tyczkowski & R. Ledzion. (1999) Electronic band structure of insulating hydrogenated carbon-germanium films. Journal of Applied Physics 86:8, pages 4412-4418.
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N. Saito, Y. Inui, T. Yamaguchi & I. Nakaaki. (1999) Indium doping of amorphous SiC:H films prepared by reactive magnetron co-sputtering. Thin Solid Films 353:1-2, pages 189-193.
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N. Saito, Y. Inui, T. Yamaguchi & I. Nakaaki. (1998) Effects of gallium doping on the properties of amorphous-SiC:H films prepared by magnetron cosputtering. Journal of Applied Physics 83:4, pages 2067-2071.
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Tianfu Ma, Jun Xu, Kunji Chen, Jiafang Du, Wei Li & Xinfan Huang. (1998) Red–green–blue light emission from hydrogenated amorphous silicon carbide films prepared by using organic compound xylene as carbon source. Applied Physics Letters 72:1, pages 13-15.
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Akimori Tabata, Yasuharu Kuno, Yasuo Suzuoki & Teruyoshi Mizutani. (1997) Properties of hydrogenated amorphous silicon carbide films prepared by a separately excited plasma CVD method. Journal of Physics D: Applied Physics 30:2, pages 194-201.
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Tian-fu Ma, Kun-ji Chen, Jia-fang Du, Jun Xu, Wei Li & Xin-fan Huang. (1996) Blue Light Emission from Hydrogenated Amorphous Silicon Carbide Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System. Chinese Physics Letters 13:12, pages 947-949.
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