75
Views
60
CrossRef citations to date
0
Altmetric
Original Articles

Structural study of hydrogenated amorphous silicon–carbon alloys

, &
Pages 113-131 | Received 12 Aug 1985, Accepted 15 Apr 1986, Published online: 27 Sep 2006

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (6)

R. EI Ghrandi, J. Calderer, B. Garrido, J. J. Pedroviejo & J. R. Morante. (1996) Local structure and oxygen absorption in a-Si1−xCx (x< 0·4) alloys grown on silicon by plasma enhanced chemical vapour deposition. Materials Science and Technology 12:1, pages 103-107.
Read now
John Robertson. (1992) The electronic and atomic structure of hydrogenated amorphous Si—C alloys. Philosophical Magazine B 66:5, pages 615-638.
Read now
H. Inui, H. Mori, A. Suzuki & H. Fujita. (1992) Electron-irradiation-induced crystalline-to-amorphous transition in β-SiC single crystals. Philosophical Magazine B 65:1, pages 1-14.
Read now
V. Drchal & J. Málek. (1990) A structural model of hydrogenated amorphous silicon. Philosophical Magazine B 62:3, pages 271-287.
Read now
Z.Q. Liu, D.R. Mckenzie, D.J. H. Cockayne & D.M. Dwarte. (1988) Electron diffraction study of the structure of boron-and phosphorus-doped hydrogenated amorphous silicon. Philosophical Magazine B 57:6, pages 753-761.
Read now
J. Robertson. (1986) Amorphous carbon. Advances in Physics 35:4, pages 317-374.
Read now

Articles from other publishers (54)

Yu-Jen Chou, Konstantin B. Borisenko, Partha Pratim Das, Stavros Nicolopoulos, Mauro Gemmi & Angus I. Kirkland. (2023) Influence of Precession Electron Diffraction Parameters and Energy Filtering on Reduced Density Function Analysis of Thin Amorphous Silica Films—Implications for Structural Studies. Symmetry 15:7, pages 1291.
Crossref
V.I. Ivashchenko, P.E.A. Turchi, R.V. Shevchenko, Leonid Gorb, Jerzy Leszczynski & A.O. Kozak. (2022) An effect of nitrogen incorporation on the structure and properties of amorphous SiC: First-principles molecular dynamics simulations. Thin Solid Films 756, pages 139349.
Crossref
Ahmed M. Jasim, Xiaoqing He, Yangchuan Xing, Tommi A. White & Matthias J. Young. (2021) Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM. ACS Omega 6:13, pages 8986-9000.
Crossref
João Batista Souza Junior, Gabriel Ravanhani Schleder, Jefferson Bettini, Içamira Costa Nogueira, Adalberto Fazzio & Edson Roberto Leite. (2021) Pair Distribution Function Obtained from Electron Diffraction: An Advanced Real-Space Structural Characterization Tool. Matter 4:2, pages 441-460.
Crossref
Tatiana E. Gorelik, Reinhard Neder, Maxwell W. Terban, Zhongbo Lee, Xiaoke Mu, Christoph Jung, Timo Jacob & Ute Kaiser. (2019) Towards quantitative treatment of electron pair distribution function. Acta Crystallographica Section B Structural Science, Crystal Engineering and Materials 75:4, pages 532-549.
Crossref
Tatiana E. Gorelik, Martin U. Schmidt, Ute Kolb & Simon J. L. Billinge. (2014) Total-Scattering Pair-Distribution Function of Organic Material from Powder Electron Diffraction Data. Microscopy and Microanalysis 21:2, pages 459-471.
Crossref
Chih-Hsien Cheng, Chung-Lun Wu, Yung-Hsiang Lin, Wen-Long Yan, Min-Hsiung Shih, Jung-Hung Chang, Chih-I Wu, Chao-Kuei Lee & Gong-Ru Lin. (2015) Strong optical nonlinearity of the nonstoichiometric silicon carbide. Journal of Materials Chemistry C 3:39, pages 10164-10176.
Crossref
Kun Xue, Li-Sha Niu & Hui-Ji Shi. (2008) Effects of quench rates on the short- and medium-range orders of amorphous silicon carbide: A molecular-dynamics study. Journal of Applied Physics 104:5.
Crossref
Izabela Szlufarska, Rajiv K. Kalia, Aiichiro Nakano & Priya Vashishta. (2007) A molecular dynamics study of nanoindentation of amorphous silicon carbide. Journal of Applied Physics 102:2.
Crossref
Priya Vashishta, Rajiv K. Kalia, Aiichiro Nakano & José Pedro Rino. (2007) Interaction potential for silicon carbide: A molecular dynamics study of elastic constants and vibrational density of states for crystalline and amorphous silicon carbide. Journal of Applied Physics 101:10.
Crossref
Manabu Ishimaru, In-Tae Bae, Akihiko Hirata, Yoshihiko Hirotsu, James A. Valdez & Kurt E. Sickafus. (2006) Chemical short-range order in ion-beam-induced amorphous SiC: Irradiation temperature dependence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 242:1-2, pages 473-475.
Crossref
José P. Rino, Ingvar Ebbsjö, Paulo S. Branicio, Rajiv K. Kalia, Aiichiro Nakano, Fuyuki Shimojo & Priya Vashishta. (2004) Short- and intermediate-range structural correlations in amorphous silicon carbide: A molecular dynamics study. Physical Review B 70:4.
Crossref
Cesar R.S. da Silva, João F. Justo & A. Fazzio. (2004) On the reversibility of hydrogen effects on the properties of amorphous silicon carbide. Journal of Non-Crystalline Solids 338-340, pages 299-302.
Crossref
D.G McCulloch, A.R Merchant, N.A Marks, N.C Cooper, P Fitzhenry, M.M.M Bilek & D.R McKenzie. (2003) Wannier function analysis of tetrahedral amorphous networks. Diamond and Related Materials 12:10-11, pages 2026-2031.
Crossref
Y Hirotsu, T Ohkubo, I.-T Bae & M Ishimaru. (2003) Electron diffraction structure analysis for amorphous materials. Materials Chemistry and Physics 81:2-3, pages 360-363.
Crossref
In-Tae Bae, Manabu Ishimaru, Yoshihiko Hirotsu, Syo Matsumura & Kurt E. Sickafus. (2003) Ion-beam-induced amorphous structures in silicon carbide. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 206, pages 974-978.
Crossref
Manabu Ishimaru, In-Tae Bae, Yoshihiko Hirotsu, Syo Matsumura & Kurt E. Sickafus. (2002) Structural Relaxation of Amorphous Silicon Carbide. Physical Review Letters 89:5.
Crossref
Cesar R. S. da Silva, J. F. Justo & A. Fazzio. (2002) Structural order and clustering in annealed and . Physical Review B 65:10.
Crossref
Manabu Ishimaru, In-Tae Bae & Yoshihiko Hirotsu. (2011) Radial distribution functions of amorphous silicon carbide. MRS Proceedings 742.
Crossref
Lu-Chang Qin. 2001. Progress in Transmission Electron Microscopy 1. Progress in Transmission Electron Microscopy 1 223 243 .
J. Shinar, R. Shinar, D. L. Williamson, S. Mitra, H. Kavak & V. L. Dalal. (1999) Microstructure and hydrogen dynamics in hydrogenated amorphous silicon carbides. Physical Review B 60:23, pages 15875-15889.
Crossref
Jiazhan Xu, W.J. Choyke & John T. YatesJr.Jr.. (1997) Amorphous SiC film formation on Si(100) using electron beam excitation. Applied Surface Science 120:3-4, pages 279-286.
Crossref
C. Serre, L. Calvo-Barrio, A. Pérez-Rodríguez, A. Romano-Rodríguez, J. R. Morante, Y. Pacaud, R. Kögler, V. Heera & W. Skorupa. (1996) Ion-beam synthesis of amorphous SiC films: Structural analysis and recrystallization. Journal of Applied Physics 79:9, pages 6907-6913.
Crossref
A. Pérez-Rodríguez, Y. Pacaud, L. Calvo-Barrio, C. Serre, W. Skorupa & J. R. Morante. (1996) Analysis of ion beam induced damage and amorphization of 6H-SiC by raman scattering. Journal of Electronic Materials 25:3, pages 541-547.
Crossref
T. Muschik & R. Schwarz. (1995) Electric-field dependence of low-temperature recombination in a -Si:H . Physical Review B 51:8, pages 5078-5088.
Crossref
Allison Cook, Alexander G. Fitzgerald, Faridah Ibrahim, John I. B. Wilson & Philip John. (1994) An EELS and EXELFS study of amorphous hydrogenated silicon carbide. Mikrochimica Acta 114-115:1, pages 255-260.
Crossref
Fabio Finocchi & Giulia Galli. (1994) Ab initio study of hydrogenation effects in amorphous silicon carbide . Physical Review B 50:11, pages 7393-7397.
Crossref
F.S. Ohuchi, T.J. Lin, J.A. Antonelli & D.J. Yang. (1994) Preparation and in-situ characterization of polycarbosilane thin films by d.c. plasma-enhanced deposition. Thin Solid Films 245:1-2, pages 10-16.
Crossref
Giulia Galli. 1994. Statics and Dynamics of Alloy Phase Transformations. Statics and Dynamics of Alloy Phase Transformations 635 652 .
Fabio Finocchi, Giulia Galli, Michele Parrinello & Carlo M. Bertoni. (1993) Chemical order in amorphous covalent alloys. Physica B: Condensed Matter 185:1-4, pages 379-383.
Crossref
M. De Seta, S. L. Wang, F. Fumi & F. Evangelisti. (1993) Auger- and photoemission-spectroscopy studies of the local density of states of a - :H alloys at low C concentration . Physical Review B 47:12, pages 7041-7048.
Crossref
D. M. Bhusari & S. T. Kshirsagar. (1993) Effect of radio-frequency power and substrate temperature on properties of hot-plasma-box glow-discharge-deposited hydrogenated amorphous silicon carbon alloys. Journal of Applied Physics 73:4, pages 1743-1749.
Crossref
Fabio Finocchi, Giulia Galli, Michele Parrinello & Carlo M. Bertoni. 1993. Wide-Band-Gap Semiconductors. Wide-Band-Gap Semiconductors 379 383 .
G. Galli & A. Pasquarello. 1993. Computer Simulation in Chemical Physics. Computer Simulation in Chemical Physics 261 313 .
K. Shimakawa & T. Aoki. (1992) dc and ac photoconductivities in hydrogenated amorphous germanium. Physical Review B 46:19, pages 12750-12752.
Crossref
P. C. Kelires. (1992) Short-range order and energetics of disordered silicon-carbon alloys. Physical Review B 46:16, pages 10048-10061.
Crossref
C. E. Parman, N. E. Israeloff & J. Kakalios. (1992) Conductance-noise power fluctuations in hydrogenated amorphous silicon. Physical Review Letters 69:7, pages 1097-1100.
Crossref
Fabio Finocchi, Giulia Galli, Michele Parrinello & Carlo M. Bertoni. (1992) Microscopic struture of amorphous covalent alloys probed by ab initio molecular dynamics: SiC . Physical Review Letters 68:20, pages 3044-3047.
Crossref
Robert E. Johanson. (1992) Drift mobility of amorphous semiconductors measured by the traveling-wave technique. Physical Review B 45:8, pages 4089-4112.
Crossref
D. K. Sharma, K. L. Narasimhan, N. Periasamy & D. R. Bapat. (1991) Temperature dependence of the electron drift mobility in doped and undoped amorphous silicon. Physical Review B 44:23, pages 12806-12808.
Crossref
Kumayasu Yoshii, Yoshifumi Suzaki, Akihiro Takeuchi, Kiyoshi Yasutake & Hideaki Kawabe. (1991) Crystallization behaviour of amorphous Si1-xCx films prepared by r.f. sputtering. Thin Solid Films 199:1, pages 85-94.
Crossref
L. S. Chang, P. L. Gendler & J. -H. Jou. (1991) Thermal, mechanical and chemical effects in the degradation of the plasma-deposited α-SiC:H passivation layer in a multilayer thin-film device. Journal of Materials Science 26:7, pages 1882-1890.
Crossref
P. C Kelires. (1991) Structure and Chemical Ordering in Amorphous Silicon Carbide Alloys. Europhysics Letters (EPL) 14:1, pages 43-48.
Crossref
Fabio Finocchi, Giulia Galli, Michele Parrinello & Carlo M. Bertoni. (1991) Structural properties of amorphous SiC via ab-initio molecular dynamics. Journal of Non-Crystalline Solids 137-138, pages 153-156.
Crossref
L. Magafas, D. Girginoudi, N. Georgoulas & A. Thanailakis. (2011) The Influence of Deposition Conditions on the Properties of a-Sic:H Thin Films. MRS Proceedings 192.
Crossref
J. Bentley, P. Angelini, P. S. Sklad & A. T. Fisher. (2020) Radial distribution functions from diffracted electron intensities. Proceedings, annual meeting, Electron Microscopy Society of America 47, pages 502-503.
Crossref
Yoshihumi Suzaki, Shozo Inoue, Isao Hasegawa, Kumayasu Yoshii & Hideaki Kawabe. (1989) Atomic structure of amorphous Si1−xCx films prepared by r.f. sputtering. Thin Solid Films 173:2, pages 235-242.
Crossref
D. R. McKenzie, J. Bruley & G. B. Smith. (1988) Electron energy-loss study of bonding in amorphous silicon-carbon alloy films prepared with hydrogen dilution. Applied Physics Letters 53:23, pages 2284-2286.
Crossref
W. G. Sainty, P. J. Martin, R. P. Netterfield, D. R. McKenzie, D. J. H. Cockayne & D. M. Dwarte. (1988) The structure and properties of ion-beam-synthesized boron nitride films. Journal of Applied Physics 64:8, pages 3980-3986.
Crossref
D. R. McKenzie, G. B. Smith & Z. Q. Liu. (1988) Electron-diffraction study of chemical ordering in glow-discharge a - :H . Physical Review B 37:15, pages 8875-8881.
Crossref
S. Prawer & C. J. Rossouw. (1988) Structural investigation of helium ion-beam-irradiated glassy carbon. Journal of Applied Physics 63:9, pages 4435-4439.
Crossref
P. Moine, A.R. Pelton & R. Sinclair. (1988) Structural determination of small amorphous volumes by electron diffraction. Journal of Non-Crystalline Solids 101:2-3, pages 213-222.
Crossref
G.R. Anstis, Z. Liu & M. Lake. (1988) Investigation of amorphous materials by electron diffraction — The effects of multiple scattering. Ultramicroscopy 26:1-2, pages 65-69.
Crossref
K. Mui, D. K. Basa, F. W. Smith & Reed Corderman. (1987) Optical constants of a series of amorphous hydrogenated silicon-carbon alloy films: Dependence of optical response on film microstructure and evidence for homogeneous chemical ordering. Physical Review B 35:15, pages 8089-8102.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.