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Philosophical Magazine B Volume 64, 1991 - Issue 1

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Original Articles

Correlation between gradients of composition and dielectric properties in oxynitride or diamond-like films on Si by means of spectroscopic ellipsometry and ion-beam analysis

J. C. Pivin Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse, IN2P3-CNRS, F-91405 Orsay Campus, France

J. L. Stehle SOPRA, 68 Rue P. Joigneaux, F-92270 Bois, Colombes, France

J. P. Piel SOPRA, 68 Rue P. Joigneaux, F-92270 Bois, Colombes, France

M. Allouard Centre de Spectrometrie Nucléaire et de Spectrométrie de Masse IN2P3-CNRS, F-91405, Orsay Campus, France

Pages 1-20 | Received 26 Mar 1990, Accepted 01 Oct 1990, Published online: 20 Aug 2006

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https://doi.org/10.1080/13642819108207599

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Articles from other publishers (9)

J.C. Pivin, G. Brusatin & G. Zalczer. (1996) Properties of molecular organo-silicate composites submitted to ion irradiations. Thin Solid Films 287:1-2, pages 65-73.
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J.C. Pivin, G. Brusatin, M. Guglielmi, G. Facchin & M. Gleria. (1996) Effects of ion irradiations on properties of polyphosphazene-silica composite films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 112:1-4, pages 294-297.
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J.C. Pivin, G. Brusatin, M. Guglielmi, G. Facchin & M. Gleria. 1996. Ion Beam Processing of Materials and Deposition Processes of Protective Coatings. Ion Beam Processing of Materials and Deposition Processes of Protective Coatings 294 297 .

Jorge Tirira, Yves Serruys & Patrick TrocellierJorge Tirira, Yves Serruys & Patrick Trocellier. 1996. Forward Recoil Spectrometry. Forward Recoil Spectrometry 1 20 .

J.C. Pivin, P. Viel, G. Zalczer & G. Marletta. (1995) Effects of ionizations and displacements on the hardness and optical absorption of some ion irradiated polymers. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 105:1-4, pages 192-196.
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S. N. Shamin, J. C. Pivin & E. Z. Kurmaev. (1993) Characterization of diamondlike films by x‐ray emission spectroscopy with high‐energy resolution. Journal of Applied Physics 73:9, pages 4605-4609.
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C. B. Collins, F. Davanloo, D. R. Jander, T. J. Lee, J. H. You, H. Park, J. C. Pivin, K. Glejbo/l & A. R. Thölén. (1992) Microstructural analyses of amorphic diamond, i ‐C, and amorphous carbon . Journal of Applied Physics 72:1, pages 239-245.
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J.C. Pivin & T.J. Lee. (1992) Effects of ion irradiation on ‘amorphous diamond’ films. Diamond and Related Materials 1:5-6, pages 650-655.
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J. C. Pivin. (1992) Tribology of amorphous diamond films grown or modified by ion implantation. Journal of Materials Science 27:24, pages 6735-6742.
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Correlation between gradients of composition and dielectric properties in oxynitride or diamond-like films on Si by means of spectroscopic ellipsometry and ion-beam analysis

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Correlation between gradients of composition and dielectric properties in oxynitride or diamond-like films on Si by means of spectroscopic ellipsometry and ion-beam analysis

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