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Philosophical Magazine B Volume 68, 1993 - Issue 3
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Original Articles

Infrared vibrational spectra of hydrogenated amorphous and microcrystalline silicon-carbon alloys

F. Demichelis Dip. Fisica-Politecnico of Torino C.so Duca degli Abruzzi 24, 10129, Torino, Italy
,
G. Crovini Dip. Fisica-Politecnico of Torino C.so Duca degli Abruzzi 24, 10129, Torino, Italy
,
C. F. Pirri Dip. Fisica-Politecnico of Torino C.so Duca degli Abruzzi 24, 10129, Torino, Italy
&
E. Tresso Dip. Fisica-Politecnico of Torino C.so Duca degli Abruzzi 24, 10129, Torino, Italy
Pages 329-340 | Received 29 Jan 1993, Accepted 10 Mar 1993, Published online: 20 Aug 2006

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S.P. Lau, J.M. Marshall & T.E. Dyer. (1995) Structural and electrical transport properties of excimer (ArF)-laser-crystallized silicon carbide. Philosophical Magazine B 72:3, pages 323-333.
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Articles from other publishers (28)

Felix Deku, Shakil Mohammed, Alexandra Joshi‐Imre, Jimin Maeng, Vindhya Danda, Timothy J. Gardner & Stuart F. Cogan. (2018) Effect of oxidation on intrinsic residual stress in amorphous silicon carbide films. Journal of Biomedical Materials Research Part B: Applied Biomaterials 107:5, pages 1654-1661.
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U. Coscia, G. Ambrosone, D.K. Basa, V. Rigato, S. Ferrero & A. Virga. (2013) Nanostructured silicon carbon thin films grown by plasma enhanced chemical vapour deposition technique. Thin Solid Films 543, pages 27-31.
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Zhang Ying, He Zhi-Bing, Li Ping & Yan Jian-Cheng. (2011) Thermal stability of Si-doped glow discharge polymer films. Acta Physica Sinica 60:12, pages 126501.
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Volodymyr Ivashchenko, Andrey Vasin, L. A. Ivashchenko & P. L. Skrynskyy. (2011) Blue/White Emission from Hydrogenated Amorphous Silicon Carbide Films Prepared by PECVD. MRS Proceedings 1153.
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L.W. Wang, B. Yang, D.Z. Wang & N.K. Huang. (2007) IR and SIMS studies in 70% SiC?C films of hydrogen introduced with different methods. Physica B: Condensed Matter 389:2, pages 207-212.
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A. Soum Glaude, L. Thomas, E. Tomasella, J.M. Badie & R. Berjoan. (2006) Selective effect of ion/surface interaction in low frequency PACVD of SIC:H films: Part B. Microstructural study. Surface and Coatings Technology 201:1-2, pages 174-181.
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Jun Xu, Jiaxin Mei, Yunjun Rui, Deyuan Chen, Zhanhong Cen, Wei Li, Zhongyuan Ma, Ling Xu, Xinfan Huang & Kunji Chen. (2006) UV and blue light emission from SiC nanoclusters in annealed amorphous SiC alloys. Journal of Non-Crystalline Solids 352:9-20, pages 1398-1401.
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G Ambrosone, G Barucca, U Coscia, S Ferrero, S Lettieri & P Maddalena. (2004) Deposition of microcrystalline silicon–carbon alloys in low power regime. Journal of Non-Crystalline Solids 338-340, pages 163-167.
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O.K. Porada, V.I. Ivashchenko, L.A. Ivashchenko, G.V. Rusakov, S.N. Dub & A.I. Stegnij. (2004) a-SiC:H films as perspective wear-resistant coatings. Surface and Coatings Technology 180-181, pages 122-126.
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V. I. Ivashchenko, O. K. Porada, L. A. Ivashchenko, G. V. Rusakov, S. M. Dub & V. M. Popov. 2005. Hydrogen Materials Science and Chemistry of Carbon Nanomaterials. Hydrogen Materials Science and Chemistry of Carbon Nanomaterials 339 346 .
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S Kerdiles, R Rizk, F Gourbilleau, A Pérez-Rodrı́guez, B Garrido, O González-Varona & J.R Morante. (2000) Low temperature direct growth of nanocrystalline silicon carbide films. Materials Science and Engineering: B 69-70, pages 530-535.
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Patrick R. McCurdy, Jason M. Truitt & Ellen R. Fisher. (1999) Pulsed and continuous wave plasma deposition of amorphous, hydrogenated silicon carbide from SiH4/CH4 plasmas. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17:5, pages 2475-2484.
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Weng-Jin Wu & Min-Hsiung Hon. (1999) The effect of residual stress on adhesion of silicon-containing diamond-like carbon coatings. Thin Solid Films 345:2, pages 200-207.
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Weng-Jin Wu & Min-Hsiung Hon. (1999) Thermal stability of diamond-like carbon films with added silicon. Surface and Coatings Technology 111:2-3, pages 134-140.
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M.Ben el Mekki, N. Mestres, J. Pascual, E. Pascual, M.C. Polo & J.L. Andújar. (1998) Compositional characterization of a-SiC:H films by infra-red spectroscopy. Diamond and Related Materials 7:2-5, pages 365-368.
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Weng-Jin Wu & Min-Hsiung Hon. (2011) The effect of silicon on thermal stability and wear behavior of diamond-like carbon films. MRS Proceedings 555.
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A. Bendeddouche, R. Berjoan, E. Bêche, T. Merle-Mejean, S. Schamm, V. Serin, G. Taillades, A. Pradel & R. Hillel. (1997) Structural characterization of amorphous SiCxNy chemical vapor deposited coatings. Journal of Applied Physics 81:9, pages 6147-6154.
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Jeffrey R. Bottin, Patrick R. McCurdy & Ellen R. Fisher. (1997) A versatile substrate heater for thermal and plasma-enhanced chemical-vapor deposition. Review of Scientific Instruments 68:5, pages 2149-2155.
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Arup Dasgupta, Sukriti Ghosh, S.T. Kshirsagar & Swati Ray. (1997) Effect of chamber pressure on p-type μc-SiC:H thin films prepared by photo-CVD. Thin Solid Films 295:1-2, pages 37-42.
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Shu-Ya Lin. (1996) Vibrational local modes of a -Si1− x C x :H alloys and variation of local modes in different local environments . Journal of Applied Physics 80:3, pages 1399-1404.
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S.M. Vaezi-Nejad. (1996) Instrumentation aspects and application of charge transport measurement techniques. Measurement 17:4, pages 267-277.
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Shu-Ya Lin. (1996) Deep defect states in a-Si:(H,C) alloys. Materials Chemistry and Physics 43:1, pages 19-24.
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E. Pascual, J.L. Andújar, J.L. Fernández & E. Bertran. (1995) Optical and structural characterization of hydrogenated amorphous silicon carbide thin films prepared by r.f. plasma chemical vapour deposition. Diamond and Related Materials 4:10, pages 1205-1209.
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E. Pascual, J.L. Andújar, J.L. Fernández & E. Bertran. (1995) Spectral ellipsometric and compositional characterization of hydrogenated amorphous silicon carbide thin films. Diamond and Related Materials 4:5-6, pages 702-705.
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S. Wickramanayaka, K. Kitamura, Y. Nakanishi & Y. Hatanaka. (2011) Melting Evaporation and Recrystallization of A-Sic:H Films by Excimer Laser. MRS Proceedings 397.
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F Demichelis, G Crovini, C F Pirri, E Tresso, M Fanclulli, T Piesarkiewicz & T Stapinski. (1994) Structural and optoelectronic properties of doped microcrystalline silicon carbide films. Semiconductor Science and Technology 9:8, pages 1543-1548.
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R. Flückiger, J. Meier, G. Crovini, F. Demichelis, F. Giorgis, C.F. Pirri, E. Tresso, J. Pohl, V. Rigato, S. Zandolin & F. Caccavale. (2011) Structural and Electrical Properties of Undoped Microcrystalline Silicon Grown by 70 MHz and 13.56 MHz PECVD. MRS Proceedings 358.
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