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Philosophical Magazine B Volume 77, 1998 - Issue 1
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Original Articles

Characteristics of BaTiO3 thin films on Si deposited by rf magnetron sputtering

Q. X. Jia Materials Science and Technology Division, MS K763, Los Alamos National Laboratory, Los Alamos, New Mexico, 87545, USA
,
J. L. Smith Materials Science and Technology Division, MS K763, Los Alamos National Laboratory, Los Alamos, New Mexico, 87545, USA
,
L. H. Chang Department of Electrical and Computer Engineering, State University of New York at Buffalo, Buffalo, New York, 14260, USA
&
W. A. Anderson Department of Electrical and Computer Engineering, State University of New York at Buffalo, Buffalo, New York, 14260, USA
Pages 163-175 | Received 25 Mar 1997, Accepted 01 May 1997, Published online: 13 Aug 2009

Citations (9)

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Read on this site (3)

Dinghua Bao, Kaibin Ruan, Tong Liang & Xi Yao. (2007) Structure and Electrical Properties of Barium Strontium Titanate Thin Films Directly Prepared on Bare Silicon Substrates by Chemical Solution Deposition. Ferroelectrics 357:1, pages 115-120.
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Zhongchun Wang, Veronika Kugler, Ulf Helmersson, E.K. Evangelou, N. Konofaos, Setsuo Nakao & Ping Jin. (2002) Characteristics of SrTiO3 thin films deposited on Si by rf magnetron sputtering at various substrate temperatures. Philosophical Magazine B 82:8, pages 891-903.
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E.K. Evangelou, N. Konofaos & C.B. Thomas. (2000) Properties of barium titanate (BaTiO3) thin films grown on silicon by rf magnetron sputtering. Philosophical Magazine B 80:3, pages 395-407.
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Articles from other publishers (6)

Sasmita Behera & Alika Khare. (2022) Influence of substrate temperature and oxygen pressure on the structural and optical properties of polycrystalline BaTiO3 thin films grown by PLD. Materials Science in Semiconductor Processing 140, pages 106379.
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Ki-Deuk Min, Dong-Jin Kim, Jong-Won Lee, In-Yong Park & Kyu-Jin Kim. (2008) Relationship Between Annealing Temperature and Structural Properties of BaTiO 3 Thin Films Grown on p-Si Substrates . Korean Journal of Materials Research 18:4, pages 222-227.
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Y.K. Vayunandana Reddy & D. Mergel. (2007) Frequency and temperature-dependent dielectric properties of BaTiO3 thin film capacitors studied by complex impedance spectroscopy. Physica B: Condensed Matter 391:2, pages 212-221.
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E.K. Evangelou, N. Konofaos, X. Aslanoglou, S. Kennou & C.B. Thomas. (2001) Characterization of BaTiO3 thin films on p-Si. Materials Science in Semiconductor Processing 4:1-3, pages 305-307.
Crossref
E.K. Evangelou, N. Konofaos, M.R. Craven, W.M. Cranton & C.B. Thomas. (2000) Characterisation of the BaTiO3/p-Si interface and applications. Applied Surface Science 166:1-4, pages 504-507.
Crossref
Quanxi Jia. 2000. Wiley Encyclopedia of Electrical and Electronics Engineering. Wiley Encyclopedia of Electrical and Electronics Engineering.

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