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Philosophical Magazine Volume 87, 2007 - Issue 24
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Original Articles

TEM-based phase retrieval of p–n junction wafers using the transport of intensity equation

T. C. Petersen Australian Key Centre for Microscopy and Microanalysis, The University of Sydney, Sydney, New South Wales 2006, AustraliaCorrespondence[email protected]
,
V. J. Keast School of Mathematical and Physical Sciences, The University of Newcastle, Callaghan, NSW 2308, Australia
,
K. Johnson Intel Corporation, Hillsboro, OR 97124, USA
&
S. Duvall Intel Australia Pty. Ltd., North Sydney, NSW 2060, Australia
Pages 3565-3578 | Received 19 Dec 2006, Accepted 22 Mar 2006, Published online: 22 Oct 2010

Citations (19)

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Keith A. Nugent. (2010) Coherent methods in the X-ray sciences. Advances in Physics 59:1, pages 1-99.
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Articles from other publishers (18)

Masanori Mitome. (2021) Transport of intensity equation method and its applications. Microscopy 70:1, pages 69-74.
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Jinlong Zhu, Lenan Zhang, Xiangyu Li, Kyle L. Wilke, Evelyn N. Wang & Lynford L. Goddard. (2020) Quasi‐Newtonian Environmental Scanning Electron Microscopy (QN‐ESEM) for Monitoring Material Dynamics in High‐Pressure Gaseous Environments. Advanced Science 7:19, pages 2001268.
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Axel Lubk. 2018. 141 229 .
Amin Parvizi, Wouter Van den Broek & Christoph T. Koch. (2016) Recovering low spatial frequencies in wavefront sensing based on intensity measurements. Advanced Structural and Chemical Imaging 2:1.
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Xiaobin Zhang & Yoshifumi Oshima. (2016) Atomic resolved phase map of monolayer MoS 2 retrieved by spherical aberration-corrected transport of intensity equation . Microscopy 65:5, pages 422-428.
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Timothy C. Petersen, Alexis I. Bishop, Samuel A. Eastwood, David M. Paganin, Kaye S. Morgan & Michael J. Morgan. (2016) Singularimetry of local phase gradients using vortex lattices and in-line holography. Optics Express 24:3, pages 2259.
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Amit Kohn, Avihay Habibi & Martin Mayo. (2016) Experimental evaluation of the ‘transport-of-intensity’ equation for magnetic phase reconstruction in Lorentz transmission electron microscopy. Ultramicroscopy 160, pages 44-56.
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Xiaobin Zhang & Yoshifumi Oshima. (2015) Experimental evaluation of spatial resolution in phase maps retrieved by transport of intensity equation. Microscopy 64:6, pages 395-400.
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Xiaobin Zhang & Yoshifumi Oshima. (2015) Practical procedure for retrieval of quantitative phase map for two-phase interface using the transport of intensity equation. Ultramicroscopy 158, pages 49-55.
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A. Parvizi, J. Müller, S.A. Funken & C.T. Koch. (2015) A practical way to resolve ambiguities in wavefront reconstructions by the transport of intensity equation. Ultramicroscopy 154, pages 1-6.
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E. Humphrey, C. Phatak, A.K. Petford-Long & M. De Graef. (2014) Separation of electrostatic and magnetic phase shifts using a modified transport-of-intensity equation. Ultramicroscopy 139, pages 5-12.
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Jonathan C. Petruccelli, Lei Tian & George Barbastathis. (2013) The transport of intensity equation for optical path length recovery using partially coherent illumination. Optics Express 21:12, pages 14430.
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V. J. Keast, M. J. Gladys, T. C. Petersen, C. Dwyer, C. T. Koch, T. Haber & G. Kothleitner. (2011) Energy-filtered phase retrieval using the transport of intensity equation. Applied Physics Letters 99:22, pages 221905.
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Jelena A. Schmalz, Timur E. Gureyev, David M. Paganin & Konstantin M. Pavlov. (2011) Phase retrieval using radiation and matter-wave fields: Validity of Teague's method for solution of the transport-of-intensity equation. Physical Review A 84:2.
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A.C.Y. Liu, D.M. Paganin, L. Bourgeois & P.N.H. Nakashima. (2011) Projected thickness reconstruction from a single defocused transmission electron microscope image of an amorphous object. Ultramicroscopy 111:8, pages 959-968.
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Samuel A. Eastwood, David M. Paganin & Amelia C. Y. Liu. (2011) Automated phase retrieval of a single-material object using a single out-of-focus image. Optics Letters 36:10, pages 1878.
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T. C. Petersen, M. Bosman, V. J. Keast & G. R. Anstis. (2008) Plasmon resonances and electron phase shifts near Au nanospheres. Applied Physics Letters 93:10.
Crossref
Tim C. Petersen, Vicki J. Keast & David M. Paganin. (2008) Quantitative TEM-based phase retrieval of MgO nano-cubes using the transport of intensity equation. Ultramicroscopy 108:9, pages 805-815.
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