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Philosophical Magazine Volume 88, 2008 - Issue 25
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Original Articles

Effects of gas temperature on optical and transport properties of a-Si:H films deposited by PECVD

N.-M. Liao State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China
,
W. Li State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, ChinaCorrespondence[email protected].
,
Y.-D. Jiang State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China
,
Z.-M. Wu State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China
,
K.-C. Qi School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China
&
S.-B. Li School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China
Pages 3051-3057 | Received 09 Apr 2008, Accepted 23 Sep 2008, Published online: 28 Nov 2008

Citations (3)

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Read on this site (1)

Jing Jiang, Shibin Li, Yadong Jiang, Zhiming Wu, Zhanfei Xiao & Yuanjie Su. (2012) Enhanced ultraviolet to near-infrared absorption by two-tier structured silicon formed by simple chemical etching. Philosophical Magazine 92:34, pages 4291-4299.
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Articles from other publishers (2)

Linying Cui, Alpana N. Ranade, Marvi A. Matos, Liam S. Pingree, Theo J. Frot, Geraud Dubois & Reinhold H. Dauskardt. (2012) Atmospheric Plasma Deposited Dense Silica Coatings on Plastics. ACS Applied Materials & Interfaces 4:12, pages 6587-6598.
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MaoYang Wu, Wei Li, YiJiao Qiu, JunWei Fu & YaDong Jiang. (2011) Hydrogen bonding in hydrogenated amorphous silicon thin films prepared at different precursor gas temperatures with undiluted silane. Science China Technological Sciences 54:9, pages 2310-2314.
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