64
Views
36
CrossRef citations to date
0
Altmetric
Original Articles

Application of scanning transmission electron microscopy to semiconductor devices

&
Pages 1517-1528 | Received 06 Jun 1977, Published online: 13 Sep 2006

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (3)

L.M. Brown & D. Fathy. (1981) Electron-irradiation studies of p–n junctions in silicon bipolar transistors. Philosophical Magazine B 43:4, pages 715-732.
Read now

Articles from other publishers (33)

Ondrej Dyck, Jacob L. Swett, Charalambos Evangeli, Andrew R. Lupini, Jan Mol & Stephen Jesse. (2022) Contrast Mechanisms in Secondary Electron e-Beam-Induced Current (SEEBIC) Imaging. Microscopy and Microanalysis, pages 1-17.
Crossref
M. Duchamp, H. Hu, Y.M. Lam, R.E. Dunin-Borkowski & C.B. Boothroyd. (2020) STEM electron beam-induced current measurements of organic-inorganic perovskite solar cells. Ultramicroscopy 217, pages 113047.
Crossref
. (2017) Publisher’s note. Ultramicroscopy 177, pages 14-19.
Crossref
Myung-Geun Han, Joseph A. Garlow, Matthew S.J. Marshall, Amanda L. Tiano, Stanislaus S. Wong, Sang-Wook Cheong, Frederick J. Walker, Charles H. Ahn & Yimei Zhu. (2017) Electron-beam-induced-current and active secondary-electron voltage-contrast with aberration-corrected electron probes. Ultramicroscopy 176, pages 80-85.
Crossref
Patrick Peretzki, Benedikt Ifland, Christian Jooss & Michael Seibt. (2017) Low energy scanning transmission electron beam induced current for nanoscale characterization of p-n junctions. physica status solidi (RRL) - Rapid Research Letters 11:1, pages 1600358.
Crossref
E. R. White, Alexander Kerelsky, William A. Hubbard, Rohan Dhall, Stephen B. Cronin, Matthew Mecklenburg & B. C. Regan. (2015) Imaging interfacial electrical transport in graphene–MoS2 heterostructures with electron-beam-induced-currents. Applied Physics Letters 107:22.
Crossref
Myung-Geun Han, Yimei Zhu, Katsuhiro Sasaki, Takeharu Kato, Craig A.J. Fisher & Tsukasa Hirayama. (2010) Direct measurement of electron beam induced currents in p-type silicon. Solid-State Electronics 54:8, pages 777-780.
Crossref
Shigeyasu Tanaka, Hiroki Tanaka, Tadahiro Kawasaki, Mikio Ichihashi, Takayoshi Tanji, Koji Arafune, Yoshio Ohshita & Masafumi Yamaguchi. (2008) EBIC imaging using scanning transmission electron microscopy: experiment and analysis. Journal of Materials Science: Materials in Electronics 19:S1, pages 324-327.
Crossref
C. Cabanel, D. Brouri & J. Y. Laval. (2006) Low temperature semi-quantitative analysis of local electrical field in silicon diode by transmission electron microscopy. The European Physical Journal Applied Physics 34:2, pages 107-116.
Crossref
J.C. González, M.I.N. da Silva, K.L. Bunker, A.D. Batchelor & P.E. Russell. (2003) Electrical characterization of InGaN quantum well p–n heterostructures. Microelectronics Journal 34:5-8, pages 455-457.
Crossref
Kristin L. Bunker, Juan Carlos Gonzalez, Dale Batchelor, Terrence J. Stark & Phillip E. Russell. (2011) Development of a High Lateral Resolution Electron Beam Induced Current Technique for Electrical Characterization of InGaN-Based Quantum Well Light Emitting Diodes. MRS Proceedings 743.
Crossref
H. Maya, C. Cabanel, J.-Y. Laval, L. Peymayeche, A. de Lustrac & F. Bouillaut. (2000) The electrical activity of IMPATT diodes on a nanometric scale by X-STEBIC method. The European Physical Journal Applied Physics 10:1, pages 43-51.
Crossref
Ludwig ReimerLudwig Reimer. 1998. Scanning Electron Microscopy. Scanning Electron Microscopy 253 288 .
Ludwig ReimerLudwig Reimer. 1997. Transmission Electron Microscopy. Transmission Electron Microscopy 79 142 .
P. D. Brown & C. J. Humphreys. (1996) Scanning transmission electron beam induced conductivity investigation of a Si/Si1− x Ge x /Si heterostructure . Journal of Applied Physics 80:4, pages 2527-2529.
Crossref
Ugo Valdrè. 1996. 193 215 .
Jacopo Dallari & Ugo Valdrè. (1995) Dopant Concentration Measurements by Scanning Force Microscopy via p-n Junctions Stray Fields. Microscopy Microanalysis Microstructures 6:5-6, pages 551-558.
Crossref
Paul D. Brown & Colin J. Humphreys. (2011) Stebic Revisited. MRS Proceedings 354.
Crossref
Ludwig ReimerLudwig Reimer. 1993. Transmission Electron Microscopy. Transmission Electron Microscopy 375 430 .
M. Garozzo, A. Parretta, M. Vittori, A. Camanzi & P. Alessandrini. 1991. Tenth E.C. Photovoltaic Solar Energy Conference. Tenth E.C. Photovoltaic Solar Energy Conference 529 532 .
C. Cabanel & J. Y. Laval. (1990) Localization of the electrical activity of structural defects in polycrystalline silicon. Journal of Applied Physics 67:3, pages 1425-1432.
Crossref
Ludwig ReimerLudwig Reimer. 1989. Transmission Electron Microscopy. Transmission Electron Microscopy 375 430 .
G C Perreault & D G Ast. (1988) A specimen stage with no microscope modifications used to perform EBIC in a STEM. Journal of Physics E: Scientific Instruments 21:12, pages 1175-1178.
Crossref
P. G. Everatt & U. Valdrè. (2011) A double tilting cartridge for transmission electron microscopes with maximum solid angle of exit at the specimen. Journal of Microscopy 139:1, pages 35-40.
Crossref
Ludwig ReimerLudwig Reimer. 1985. Scanning Electron Microscopy. Scanning Electron Microscopy 272 312 .
U. Valdré, G. Michelini & T.G. Sparrow. (1984) A combined specimen-holder/detector for surface and transmission imaging of samples in a STEM/CTEM or SEM. Ultramicroscopy 15:1-2, pages 109-117.
Crossref
Ludwig ReimerLudwig Reimer. 1984. Transmission Electron Microscopy. Transmission Electron Microscopy 365 420 .
H. J. Leamy. (1982) Charge collection scanning electron microscopy. Journal of Applied Physics 53:6, pages R51-R80.
Crossref
D. Fathy, T. G. Sparrow & U. Valdrè. (2011) Observation of dislocations and microplasma sites in semiconductors by direct correlations of STEBIC, STEM and ELS. Journal of Microscopy 118:3, pages 263-273.
Crossref
D.B. HOLT. 1980. Crystal Growth. Crystal Growth 567 598 .
U. Valdrè. (2011) Electron Microscope Stage Design And Applications. Journal of Microscopy 117:1, pages 55-75.
Crossref
A. J. Craven & U. Valdreè. (2011) Visibility Of Diffraction Patterns And Bend Contours In Thick Composite Amorphous‐Crystalline Specimens Observed In Stem And Ctem. Journal of Microscopy 115:2, pages 211-223.
Crossref
V. E. Cosslett, D. Fathy, T. G. Sparrow & U. Valdrè. (2006) Investigation of Semiconductor Materials and Devices by High Voltage STEM Techniques. Kristall und Technik 14:10, pages 1177-1184.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.