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Molecular Crystals and Liquid Crystals Volume 532, 2010 - Issue 1: Proceedings of the 13th International Symposium on Advanced Display Materials and Devices (ADMD2009)
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Original Articles

Properties of Transparent Conducting ATO Films Deposited by RF Magnetron Sputtering

Kwang Soo Huh Nano Fusion Research Team, Nano Practical Application Center, Daegu, Korea
,
Hyun Joo Hong R&D Institute, AVATEC Co. Ltd., Daegu, Korea
,
Eun Woo Lee Optoelectronic Devices Lab., School of Display and Chemical Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, Korea
,
Soon Yong Park Optoelectronic Devices Lab., School of Display and Chemical Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, Korea
,
Chan Wook Jeon Optoelectronic Devices Lab., School of Display and Chemical Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, Korea
&
Sung Ho Lee Nano Fusion Research Team, Nano Practical Application Center, Daegu, KoreaCorrespondence[email protected]
Pages 65/[481]-71/[487] | Published online: 14 Nov 2010

Citations (4)

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Read on this site (1)

Sungbo Seo, Yao Litao & Hwamin Kim. (2014) Preparation of Transparent Metal Films, Titanium-Doped Zinc-Oxide Films (TiO2)2 (ZnO)98 on PEN by Using a RF-Magnetron Sputtering Method. Molecular Crystals and Liquid Crystals 602:1, pages 64-71.
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Articles from other publishers (3)

J.Q. Zhang, B.L. Zhu, H. Xiong & J. Wu. (2023) Regulation of structural, electrical and optical properties of Sb-doped SnO2 films prepared with different O2 flow rates by rapid thermal annealing. Ceramics International.
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J.P. Hughes, J. Clipsham, H. Chavushoglu, S.J. Rowley-Neale & C.E. Banks. (2021) Polymer electrolyte electrolysis: A review of the activity and stability of non-precious metal hydrogen evolution reaction and oxygen evolution reaction catalysts. Renewable and Sustainable Energy Reviews 139, pages 110709.
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Junyan Wu, Zhihao Wang, Fei Chen, Qiang Shen & Lianmeng Zhang. (2019) Chemical evolution of target surfaces during RF magnetron sputtering and its effect on the performance of TCO films. Applied Surface Science 493, pages 665-672.
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