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Original Articles

A Multivariate Self-Tuning Controller for Run-To-Run Process Control under Shift and Trend Disturbances

Pages 1011-1021 | Received 01 May 1995, Accepted 01 Jul 1996, Published online: 13 Sep 2016

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Minjae Park, Jennifer Jae-Young Kim, Kyoung-min Kwon & Gun Jea Yu. (2017) Process control and economic cost design for total quality management. Total Quality Management & Business Excellence 28:7-8, pages 858-878.
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Chih-Hung Jen, Bernard C. Jiang & Chien-Chih Wang. (2011) Integration of run-to-run control schemes and on-line experiment to deal with the changes in semiconducting dynamic processes. International Journal of Production Research 49:19, pages 5657-5678.
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Chih-Hung Jen & Bernard C. Jiang. (2008) Combining on-line experiment and process control methods for changes in a dynamic model. International Journal of Production Research 46:13, pages 3665-3682.
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C.-H. Jen, B. C. Jiang & S.-K. S. Fan . (2004) General run-to-run (R2R) control framework using self-tuning control for multiple-input multiple-output (MIMO) processes. International Journal of Production Research 42:20, pages 4249-4270.
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Jinn-Yi Yeh & Bau-Hsien Huang. (2003) GENETIC ALGORITHM BASED SEMICONDUCTOR MANUFACTURING PROCESS CONTROLLER FOR CHEMICAL MECHANICAL PLANARIZATION. Journal of the Chinese Institute of Industrial Engineers 20:6, pages 625-635.
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C.M. Wright, D.E. Booth & M.Y. Hu. (2001) Joint Estimation: SPC Method for Short-Run Autocorrelated Data. Journal of Quality Technology 33:3, pages 365-378.
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Kevin Linderman & Thomas E. Love. (2000) Economic and Economic Statistical Designs for MEWMA Control Charts. Journal of Quality Technology 32:4, pages 410-417.
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ENRIQUEDEL CASTILLO. (1999) Long run and transient analysis of a double EWMA feedback controller. IIE Transactions 31:12, pages 1157-1169.
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Ruey‐Shan Guo, Jin‐Jung Chen, Argon Chen & Shui‐Shong Lu. (1999) A self‐tuning run‐by‐run process controller for processes subject to random disturbances. Journal of the Chinese Institute of Engineers 22:5, pages 627-638.
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Articles from other publishers (15)

Kai Liu, YangQuan Chen, Tao Zhang, Siyuan Tian & Xi Zhang. (2018) A survey of run-to-run control for batch processes. ISA Transactions 83, pages 107-125.
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Jinwen Hu, Min Zhou, Xiang Li & Zhao Xu. (2017) Online model regression for nonlinear time-varying manufacturing systems. Automatica 78, pages 163-173.
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Chien Chih Wang. (2013) A Study of Run-to-Run Control Efficiency for Quality Improvement. Applied Mechanics and Materials 328, pages 283-286.
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Chih Hung Jen. (2012) Evaluation the Performance of Fault Detection for dEWMA Control System. Advanced Materials Research 630, pages 235-240.
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Chih-Hung Jen & Jia-Ming Wang. (2011) Integrating the Fault Detection Method and Run-to-Run Control for Improving Semiconductor Process Control. Procedia Computer Science 4, pages 1316-1325.
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Chih-Hung Jen, Kuo-Ping Lin, Wu Wen & Chang-Chien Chou. (2011) Using LDA with on-line experiment methods for coping with changes in MIMO dynamic model. Expert Systems with Applications 38:1, pages 983-989.
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Shu-Kai S. Fan & Yen Lin. (2007) Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach. European Journal of Operational Research 180:2, pages 868-884.
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Mohammad Hossein Fazel Zarandi, Adel Alaeddini, I. Burhan Turksen & Mahdi Ghazanfari. 2007. Analysis and Design of Intelligent Systems using Soft Computing Techniques. Analysis and Design of Intelligent Systems using Soft Computing Techniques 842 852 .
Hui Wang & Qiang Huang. (2005) Automatic Process Adjustment for Reducing Dimensional Variation in Discrete Part Machining Processes. Automatic Process Adjustment for Reducing Dimensional Variation in Discrete Part Machining Processes.
Adriano Mendonça Souza, Robert Wayne Samohyl & César O Malavé. (2004) Multivariate feed back control: an application in a productive process. Computers & Industrial Engineering 46:4, pages 837-850.
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Adriano Mendonça Souza, Robert Wayne Samohyl & César O. Malavé. (2004) Aplicação de um modelo paramétrico multivariado para o controle da temperatura de fornos de túnel. Production 14:2, pages 82-94.
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S. Joe Qin, Glen W. Scheid & Terrence J. Riley. (2003) Adaptive run-to-run control and monitoring for a rapid thermal processor. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 21:1, pages 301-310.
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S.J. Qin, G.W. Scheid & T.J. Riley. (2002) Adaptive run to run control for intermittent batch operations. Adaptive run to run control for intermittent batch operations.
Christine M. Wright, Michael Y. Hu & David E. Booth. (2007) Effectiveness of Joint Estimation When the Outlier Is the Last Observation in an Autocorrelated Short Time Series. Decision Sciences 30:3, pages 825-847.
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E. Del Castillo & Jinn-Yi Yeh. (1998) An adaptive run-to-run optimizing controller for linear and nonlinear semiconductor processes. IEEE Transactions on Semiconductor Manufacturing 11:2, pages 285-295.
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