Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems

Yiming Maa School of Microelectronics, Shanghai University, Shanghai, P. R. ChinaCorrespondence[email protected]
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Weixin Liub Department of Electrical and Computer Engineering, National University of Singapore, Singapore;c Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, SingaporeView further author information

Xinmiao Liub Department of Electrical and Computer Engineering, National University of Singapore, Singapore;c Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, SingaporeView further author information

Nan Wanga School of Microelectronics, Shanghai University, Shanghai, P. R. ChinaView further author information

Hui Zhangd Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Hong Kong, P. R. ChinaCorrespondence[email protected]
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Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems

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Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems

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