530
Views
8
CrossRef citations to date
0
Altmetric
Original Articles

Optimization of diffractive MEMS for optical switching

, &
Pages 87-100 | Received 01 Jun 2006, Accepted 01 Sep 2006, Published online: 01 Dec 2010

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (1)

Guangcan Zhou, Zi Heng Lim, Yi Qi, Fook Siong Chau & Guangya Zhou. (2021) MEMS gratings and their applications. International Journal of Optomechatronics 15:1, pages 61-86.
Read now

Articles from other publishers (7)

I. L. Baginsky & E. G. Kostsov. (2018) Capacitive Motors with a High Specific Power Capacity. Optoelectronics, Instrumentation and Data Processing 54:5, pages 490-495.
Crossref
E. G. Kostsov, A. I. Skurlatov & A. M. Shcherbachenko. (2018) Optoelectronic System for Studying Nanodisplacements of Moving MEMS Elements. Optoelectronics, Instrumentation and Data Processing 54:4, pages 397-404.
Crossref
Arpys Arevalo, E. Byas, D. Conchouso, D. Castro, S. Ilyas & I. G. Foulds. (2015) A versatile multi-user polyimide surface micromachinning process for MEMS applications. A versatile multi-user polyimide surface micromachinning process for MEMS applications.
E. G. Kostsov & I. V. Knyazev. (2013) Microelectromechanical diffraction gratings: Areas of applicability and prospects. Optoelectronics, Instrumentation and Data Processing 49:3, pages 273-286.
Crossref
I. L. Baginsky, E. G. Kostsov & A. A. Sokolov. (2011) Electrostatic microgenerators of energy with a high specific power. Optoelectronics, Instrumentation and Data Processing 46:6, pages 580-592.
Crossref
E. G. Kostsov & V. S. Sobolev. (2010) Low-voltage element of a field-programmable dynamic diffraction grating. Optoelectronics, Instrumentation and Data Processing 46:3, pages 287-293.
Crossref
E. G. Kostsov. (2009) Status and prospects of micro- and nanoelectromechanics. Optoelectronics, Instrumentation and Data Processing 45:3, pages 189-226.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.