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International Journal of Smart and Nano Materials Volume 4, 2013 - Issue 2

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A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

Yanhui Yuan School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore, Singapore

Kun Shyong Chow School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore, Singapore

Hejun Du School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore, SingaporeCorrespondence[email protected]

Peihong Wang School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore, Singapore

Mingsheng Zhang Data Storage Institute, Singapore, Singapore

Shengkai Yu Data Storage Institute, Singapore, Singapore

Bo Liu Data Storage Institute, Singapore, Singapore

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Pages 128-141 | Received 21 Aug 2012, Accepted 06 Nov 2012, Published online: 10 Dec 2012

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https://doi.org/10.1080/19475411.2012.749959

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A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

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A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

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