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International Journal of Smart and Nano Materials Volume 13, 2022 - Issue 2
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Research Article

Design of a linear-rotary ultrasonic motor for optical focusing inspired by the bionic motion principles of the earthworms

Yingzhi WangState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, Heilongjiang Province, ChinaView further author information
,
Jie DengState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, Heilongjiang Province, ChinaView further author information
,
Shijing ZhangState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, Heilongjiang Province, ChinaView further author information
,
He LiState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, Heilongjiang Province, ChinaView further author information
,
Weishan ChenState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, Heilongjiang Province, ChinaView further author information
&
Yingxiang LiuState Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, Heilongjiang Province, ChinaCorrespondence[email protected]
ORCID Iconhttps://orcid.org/0000-0001-5684-9159View further author information
ORCID Icon
Pages 346-365 | Received 16 Apr 2022, Accepted 22 May 2022, Published online: 06 Jun 2022

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