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Full Length Article

Low temperature processed CO₂ laser-assisted RF-sputtered GaN thin film for wide bandgap semiconductors

Seoung-Hyoun Kima School of Electrical and Electronics Engineering, Chung-Ang University, Seoul, Republic of KoreaView further author information

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Chang-Hyeon Job Graduate School of Intelligent Energy and Industry, Chung-Ang University, Seoul, Republc of KoreaView further author information

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Min-Sung Baeb Graduate School of Intelligent Energy and Industry, Chung-Ang University, Seoul, Republc of KoreaView further author information

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Masaya Ichimurac Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology, Nagoya, JapanView further author information

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Jung-Hyuk Koha School of Electrical and Electronics Engineering, Chung-Ang University, Seoul, Republic of KoreaCorrespondence[email protected]
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