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Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Shuichi Date, Hidehiko Yamaoka & Hiroshi Akatsuka. (2022) Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model. IEEE Transactions on Plasma Science 50:6, pages 1875-1889.
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Dong Hwan KIM, Jeong Eun CHOI & Sang Jeen HONG. (2021)
Analysis of optical emission spectroscopy data during silicon etching in SF
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Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Hidehiko Yamaoka, Shuichi Date & Hiroshi Akatsuka. (2021) Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model. Japanese Journal of Applied Physics 60:4, pages 046003.
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Ryujiro Suzuki, Yuya Matsuoka, Daisuke Hirotani, Atsushi Nezu, Shinsuke Mori & Hiroshi Akatsuka. (2021)
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