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Functional Diamond Volume 2, 2022 - Issue 1

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Research Article

Study of horizontal and vertical uniformity of B-doped layer on mosaic single crystal diamond wafers by using hot-filament chemical vapor deposition

Hideaki YamadaDiamond Wafer Team, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Ikeda, Osaka, JapanCorrespondence[email protected]
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Takehiro ShimaokaDiamond Wafer Team, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Ikeda, Osaka, Japan

https://orcid.org/0000-0002-4298-404X View further author information

Pages 46-52 | Received 28 Mar 2022, Accepted 18 Apr 2022, Published online: 05 May 2022

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https://doi.org/10.1080/26941112.2022.2068972
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Weihua Wang, Benjian Liu, Leining Zhang, Jiecai Han, Kang Liu, Bing Dai & Jiaqi Zhu. (2022) Heteroepitaxy of diamond semiconductor on iridium: a review. Functional Diamond 2:1, pages 215-235.
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