Citations (2)
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Functional Diamond
Volume 3, 2023 - Issue 1
Research Article
Effect of defects on Q factors of single-crystal diamond MEMS resonators
Zilong ZhangUltra-wide Bandgap Semiconductors Group, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan
https://orcid.org/0000-0002-9759-9253View further author information
https://orcid.org/0000-0002-9759-9253View further author information, , , Satoshi KoizumiUltra-wide Bandgap Semiconductors Group, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japanhttps://orcid.org/0000-0003-4961-5658View further author information
https://orcid.org/0000-0003-4961-5658View further author information & Meiyong LiaoUltra-wide Bandgap Semiconductors Group, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, JapanCorrespondence[email protected]
https://orcid.org/0000-0003-1361-4266View further author information
https://orcid.org/0000-0003-1361-4266View further author information