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Integrated Ferroelectrics
An International Journal
Volume 59, 2003 - Issue 1
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Original Articles

Influence of Post-Annealing on the Characteristics of Pb(Zr,Ti)O3 Thin Films Deposited by Liquid Delivery MOCVD Using a Cocktail Solution

Yohei Otani Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
,
Norikazu Abe Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
,
Soichiro Okamura Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
&
Tadashi Shiosaki Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0101, Japan
Pages 1475-1482 | Published online: 18 Jun 2010

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YOHEI OTANI, KIYOSHI UCHIYAMA, SOICHIRO OKAMURA & TADASHI SHIOSAKI. (2006) LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O3 THIN FILMS BY LIQUID DELIVERY MOCVD USING A COCKTAIL SOURCE WITH Pb(DMAMP)2, Zr(MMP)4 AND Ti(MMP)4 . Integrated Ferroelectrics 81:1, pages 261-270.
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YOHEI OTANI, KIMITOSHI NAKAMURA, SOICHIRO OKAMURA & TADASHI SHIOSAKI. (2004) Fabrication of Pb(Zr,Ti)O3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(DPM)2, Zr(MMP)4 and Ti(MMP)4 . Integrated Ferroelectrics 68:1, pages 105-121.
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