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Science and Technology of Advanced Materials Volume 9, 2008 - Issue 2
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Topical Review

Fabrication and characterization of nanostructures on insulator substrates by electron-beam-induced deposition

Minghui SongAdvanced Nano Characterization Center, National Institute for Materials Science, Tsukuba305-0003, JapanCorrespondence[email protected]
&
Kazuo FuruyaAdvanced Nano Characterization Center, National Institute for Materials Science, Tsukuba305-0003, Japan
Article: 023002 | Received 05 Dec 2007, Accepted 19 Feb 2008, Published online: 01 Aug 2008

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Vladimir D Blank, Boris A Kulnitskiy, Igor A Perezhogin, Yuriy L Alshevskiy & Nikita V Kazennov. (2009) Decomposition of Fe5C2 catalyst particles in carbon nanofibers during TEM observation. Science and Technology of Advanced Materials 10:1.
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Shikhar Misra & Haiyan Wang. (2021) Review on the growth, properties and applications of self-assembled oxide–metal vertically aligned nanocomposite thin films—current and future perspectives. Materials Horizons 8:3, pages 869-884.
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F. Bonetto, C. Silva, E.H. Martins Ferreira, A. Candia, M.C.G. PasseggiJr.Jr., S. Montoro & R. Vidal. (2021) Formation of graphitic films on Cu(111) via electron beam induced deposition. Vacuum 183, pages 109824.
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Martin Drost, Fan Tu, Luisa Berger, Christian Preischl, Wencai Zhou, Hartmut Gliemann, Christof Wöll & Hubertus Marbach. (2018) Surface-Anchored Metal–Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures. ACS Nano 12:4, pages 3825-3835.
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Simon Vigonski, Ville Jansson, Sergei Vlassov, Boris Polyakov, Ekaterina Baibuz, Sven Oras, Alvo Aabloo, Flyura Djurabekova & Vahur Zadin. (2018) Au nanowire junction breakup through surface atom diffusion. Nanotechnology 29:1, pages 015704.
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M. Neustetter, E. Jabbour Al Maalouf, P. Limão-Vieira & S. Denifl. (2016) Fragmentation pathways of tungsten hexacarbonyl clusters upon electron ionization. The Journal of Chemical Physics 145:5.
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Michael Neustetter, Andreas Mauracher, Paulo Limão-Vieira & Stephan Denifl. (2016) Complete ligand loss in electron ionization of the weakly bound organometallic tungsten hexacarbonyl dimer. Physical Chemistry Chemical Physics 18:15, pages 9893-9896.
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Guoqiang Xie. 2016. Encyclopedia of Nanotechnology. Encyclopedia of Nanotechnology 1067 1071 .
Nicholas A Roberts, Carlos M Gonzalez, Jason D Fowlkes & Philip D Rack. (2013) Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO) 6 with improved conductivity and resolution . Nanotechnology 24:41, pages 415301.
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Vladimir P. Oleshko & James M. Howe. 2013. 203 262 .
K. Wnorowski, M. Stano, C. Matias, S. Denifl, W. Barszczewska & Š. Matejčík. (2012) Low‐energy electron interactions with tungsten hexacarbonyl – W(CO) 6 . Rapid Communications in Mass Spectrometry 26:17, pages 2093-2098.
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K. Wnorowski, M. Stano, W. Barszczewska, A. Jówko & Š. Matejčík. (2012) Electron ionization of W(CO)6: Appearance energies. International Journal of Mass Spectrometry 314, pages 42-48.
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Sanne K. de Boer, Willem F. van Dorp & Jeff Th. M. De Hosson. (2011) Charging effects during focused electron beam induced deposition of silicon oxide. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 29:6.
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J. C. van Oven, F. Berwald, K. K. Berggren, P. Kruit & C. W. Hagen. (2011) Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 29:6, pages 06F305.
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Eugenii U. Donev, Gregory Schardein, John C. Wright & J. Todd Hastings. (2011) Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor. Nanoscale 3:7, pages 2709.
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K Makise, K Mitsuishi, M Shimojo & K Furuya. (2009) A nanosized photodetector fabricated by electron-beam-induced deposition. Nanotechnology 20:42, pages 425305.
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A Botman, J J L Mulders & C W Hagen. (2009) Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective. Nanotechnology 20:37, pages 372001.
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Konstantin Iakoubovskii & Kazutaka Mitsuishi. (2009) Elastic scattering of 200 keV electrons in elemental solids: experimental observation of atomic-number-dependent oscillatory behavior. Journal of Physics: Condensed Matter 21:15, pages 155402.
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Andrei Ionut Mardare, Sergiy Borodin, Andreas Dirk Wieck, Michael Rohwerder & Achim Walter Hassel. (2009) Gold Nanoparticles Partially Embedded in Ultrathin Anodic Alumina Films. The Journal of Physical Chemistry C 113:8, pages 3105-3109.
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Konstantin Iakoubovskii. (2009) Dense argon nano-inclusions in Verneuil-grown SrTiO 3 single crystals . Nanotechnology 20:8, pages 085711.
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Konstantin Iakoubovskii. (2009) Techniques of aligning carbon nanotubes. Open Physics 7:4.
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