Citations (11)
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Ivin Varghese, M. D. Murthy Peri, Thomas Dunbar, Brian Maynard, DerekA. Thomas & Cetin Cetinkaya. (2008) Removal of Nanoparticles With Laser Induced Plasma. Journal of Adhesion Science and Technology 22:5-6, pages 651-674.
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Murthy Peri, Ivin Varghese, Dong Zhou, Arun John, Chen Li & Cetin Cetinkaya. (2007) Nanoparticle Removal Using Laser-Induced Plasma Shock Waves. Particulate Science and Technology 25:1, pages 91-106.
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Vamsi Krishna Devarapalli, M.D. Murthy Peri & Cetin Cetinkaya. (2006) Particle removal with liquid-film-enhanced laser-induced plasma. Journal of Adhesion Science and Technology 20:2-3, pages 233-243.
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Ivin Varghese & Cetin Cetinkaya. (2004) Non-contact removal of 60-nm latex particles from silicon wafers with laser-induced plasma. Journal of Adhesion Science and Technology 18:7, pages 795-806.
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Vamsi Krishna Devarapalli, Ying Li & Cetin Cetinkaya. (2004) Post-chemical mechanical polishing cleaning of silicon wafers with laser-induced plasma. Journal of Adhesion Science and Technology 18:7, pages 779-794.
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Articles from other publishers (6)
Shomik Mukhopadhyay, Khushi Patel, Mirko Schoenitz & Edward L. Dreizin. (2023) Removal of powders from cavities in contaminated surfaces by shock and plasma generated by an adjacent electro-static discharge. Powder Technology 420, pages 118407.
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Shuowen Zhang, Qingyu Yan, Jian Lin, Qunli Zhang, Yongfeng Lu, Jianhua Yao & Lisha Fan. (2021) Elimination of blind zone in nanoparticle removal on silicon wafers using a double-beam laser shockwave cleaning process. Applied Surface Science 539, pages 148057.
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Ci Huang, Mirko Schoenitz & Edward L. Dreizin. (2019) Displacement of powders from surface by shock and plasma generated by electrostatic discharge. Journal of Electrostatics 100, pages 103353.
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Magdalèna Couty, Hugues A. Girard & Samuel Saada. (2015) Nanoparticle Adhesion and Mobility in Thin Layers: Nanodiamonds As a Model. ACS Applied Materials & Interfaces 7:29, pages 15752-15764.
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Ivin Varghese & Çetin Cetinkaya. (2012) Laser-Induced Plasma Exposure on Extreme Ultraviolet Lithography Masks: Damage Analysis. IEEE Transactions on Semiconductor Manufacturing 25:4, pages 630-637.
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Cetin Cetinkaya & M D Murthy Peri. (2004) Non-contact nanoparticle removal with laser induced plasma pulses. Nanotechnology 15:5, pages 435-440.
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