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Journal of Adhesion Science and Technology Volume 22, 2008 - Issue 5-6: Micro/Nano-Scale Adhesion
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Articles

Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces

Xiaojie Xue Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, Illinois 61801, USA
,
Andreas A. Polycarpou Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 1206 West Green Street, Urbana, Illinois 61801, USA
&
Leslie M. Phinney Sandia National Laboratories, Engineering Sciences Center, P.O. Box 5800 MS 0346, Albuquerque, New Mexico 87185, USA
Pages 429-455 | Published online: 02 Apr 2012

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Read on this site (2)

Jun-yi Sun, Jian-li Hu, Xiao-ting He, Zhou-lian Zheng & Huan-huan Geng. (2011) A Theoretical Study of Thin Film Delamination Using Clamped Punch-Loaded Blister Test: Energy Release Rate and Closed-Form Solution. Journal of Adhesion Science and Technology 25:16, pages 2063-2080.
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Seung Min Yeo, AndreasA. Polycarpou, SpyrosI. Tseregounis, Negar Tavassolian & John Papapolymerou. (2010) Characterization and Adhesion of Interacting Surfaces in Capacitive RF MEMS Switches Undergoing Cycling. Journal of Adhesion Science and Technology 24:15-16, pages 2617-2639.
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Articles from other publishers (11)

Jun Zhong. 2021. Tribology in Materials and Manufacturing - Wear, Friction and Lubrication. Tribology in Materials and Manufacturing - Wear, Friction and Lubrication.
T. V. Hoang, L. Wu, J.-C. Golinval, M. Arnst & L. Noels. (2018) Stochastic Multiscale Model of MEMS Stiction Accounting for High-Order Statistical Moments of Non-Gaussian Contacting Surfaces. Journal of Microelectromechanical Systems 27:2, pages 137-155.
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T.-V. Hoang, L. Wu, S. Paquay, J.-C. Golinval, M. Arnst & L. Noels. (2017) A computational stochastic multiscale methodology for MEMS structures involving adhesive contact. Tribology International 110, pages 401-425.
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Emrecan Soylemez & Maarten P de Boer. (2016) van der Waals force-induced crack healing in dry rough interfaces. Journal of Physics D: Applied Physics 49:7, pages 075303.
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W Merlijn van Spengen. (2015) A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another ‘identical’ one does not. Journal of Micromechanics and Microengineering 25:12, pages 125012.
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Emrecan Soylemez & Maarten P. de Boer. (2015) Crack Healing Between Rough Polycrystalline Silicon Hydrophilic Surfaces in n-Pentanol and Water Vapors. Tribology Letters 59:1.
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Jun Zhong, Robab Shakiba & James B Adams. (2013) Molecular dynamics simulation of severe adhesive wear on a rough aluminum substrate. Journal of Physics D: Applied Physics 46:5, pages 055307.
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I. Laboriante, N. Klejwa, A. Suwandi, C. Carraro, Roger T. Howe & R. Maboudian. (2011) Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating. Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating.
Seung Yeo, Andreas Polycarpou, Spyros Tseregounis, Negar Tavassolian & John Papapolymerou. 2011. Adhesion Aspects in MEMS/NEMS. Adhesion Aspects in MEMS/NEMS 285 307 .
Erik Hsiao, Matthew J. Marino & Seong H. Kim. (2010) Effects of gas adsorption isotherm and liquid contact angle on capillary force for sphere-on-flat and cone-on-flat geometries. Journal of Colloid and Interface Science 352:2, pages 549-557.
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G H Li, I Laboriante, F Liu, M Shavezipur, B Bush, C Carraro & R Maboudian. (2010) Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure. Journal of Micromechanics and Microengineering 20:9, pages 095015.
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