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Surface Engineering Volume 19, 2003 - Issue 2
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Articles

Sidewall Surface Roughness of Sputtered Silicon I: Surface Modelling

M. Y. Ali Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
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N. P. Hung Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
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B. K. A. Ngoi Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
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S. Yuan Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
Pages 97-103 | Published online: 19 Jul 2013

Citations (8)

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Read on this site (1)

M. Y. Ali & B. H. Lim. (2006) Characterisation of surface texture using AFM with trimmed probe tip. Surface Engineering 22:6, pages 443-446.
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Articles from other publishers (7)

Lirong Zhao, Yimin Cui, Wenping Li, Wajid Ali Khan & Yutian Ma. (2019) 3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model. Applied Sciences 9:23, pages 5133.
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N. Atiqah, I.H. Jaafar, Mohammad Yeakub Ali & B. Asfana. (2012) Application of Focused Ion Beam Micromachining: A Review. Advanced Materials Research 576, pages 507-510.
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Nurul HajarMohammad Yeakub Ali. (2011) Investigation of Microholes Produced by Focused Ion Beam Micromachining. Advanced Materials Research 264-265, pages 1346-1351.
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Mohammad Yeakub Ali, Wayne Hung & Fu Yongqi. (2010) A review of focused ion beam sputtering. International Journal of Precision Engineering and Manufacturing 11:1, pages 157-170.
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S N Bhavsar, S Aravindan & P Venkateswara Rao. (2010) An accurate and efficient control over the present numerical model of depth of sputtering in focused ion beam milling. Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems 223:1, pages 9-18.
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Yunpeng Yin & Herbert H. Sawin. (2008) Angular etching yields of polysilicon and dielectric materials in Cl2∕Ar and fluorocarbon plasmas. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26:1, pages 161-173.
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M. Y. Ali & A. S. Ong. (2006) Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering. The International Journal of Advanced Manufacturing Technology 31:5-6, pages 501-508.
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