Advanced search
Publication Cover
Surface Engineering Volume 22, 2006 - Issue 1
Journal homepage
12
Views
4
CrossRef citations to date
0
Altmetric
Articles

Prediction of radio frequency power effect on silicon nitride deposition using a genetic algorithm based neural network

B. KimDepartment of Electronic Engineering, Bio Engineering Research Institute, Sejong University 98, Goonja2Dong, wangjin2Gu, Seoul, 1432747, Korea
,
J. BaeDepartment of Electronic Engineering, Bio Engineering Research Institute, Sejong University 98, Goonja2Dong, wangjin2Gu, Seoul, 1432747, Korea
&
S. S. HanDepartment of Information Engineering, Myongi University, Yongin 449-728, KoreaCorrespondence[email protected]
Pages 63-68 | Published online: 19 Jul 2013

Citations (4)

Keep up to date with the latest research on this topic with citation updates for this article.

Subscribe to citation updates

Read on this site (3)

S. Y. Kim & B. Kim. (2009) Modelling of spatial plasma by using neural network. Surface Engineering 25:6, pages 417-422.
Read now
Byungwhan Kim, Hwajune Lee & Donghwan Kim. (2009) MODELING OF THIN FILM PROCESS DATA USING A GENETIC ALGORITHM-OPTIMIZED INITIAL WEIGHT OF BACKPROPAGATION NEURAL NETWORK. Applied Artificial Intelligence 23:2, pages 168-178.
Read now
Byungwhan Kim, Gi Tae Kim & Hwa Jun Lee. (2008) Ex Situ Plasma Diagnosis by Recognition of X-Ray Photoelectron Spectroscopy Data Using a Neural Network. Materials and Manufacturing Processes 23:5, pages 528-532.
Read now

Articles from other publishers (1)

Indira G. Escamilla-Salazar, Luis M. Torres-Treviño, Bernardo González-Ortíz & Patricia C. Zambrano. (2012) Machining optimization using swarm intelligence in titanium (6Al 4V) alloy. The International Journal of Advanced Manufacturing Technology 67:1-4, pages 535-544.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.